OTF1200XIIIR5 5-Inch Rotary CVD Tube Furnace with Three-Zone Heating up to 1200°C and Automatic Feeding & Receiving System
The OTF1200XIIIR5 is engineered for continuous chemical vapor deposition (CVD) and thermal processing of powders, particularly suited for lithium-ion battery cathode and anode materials such as LiFePO4, LiMnNiO3, and Si/C composites. Its design enables uniform heating and controlled atmosphere processing to achieve consistent conductive coatings and material properties.
This rotary tube furnace incorporates a 5-inch outer diameter fused quartz tube with a total heating length of 600 mm divided into three independently controlled zones. The tube rotates at variable speeds up to 10 RPM, driven by a DC gear motor, and can be tilted electrically between -5° and 20° to optimize powder tumbling and heat exposure. An automatic feeding and receiving system allows continuous powder introduction and collection without exposure to air, preserving material integrity.
Key Features
- Three-zone heating with 600 mm total length providing ±1°C temperature uniformity in the constant zone
- Maximum working temperature of 1150°C for short durations, continuous operation at 1100°C
- Automatic powder feeding system with vacuum-sealed swivel coupling ensuring uniform feed rate up to 97 cm³/min
- Stainless steel receiving tank (1 L capacity) with hermetic sealing to prevent air exposure
- Variable tube rotation speed from 0 to 10 RPM and electrical tilt control from -5° to 20°
- Double shell casing with alumina fiber insulation and cooling fans for energy efficiency
- Three PID digital temperature controllers with 30 programmable segments and RS485 communication port
Technical Specifications
| Parameter | Specification |
|---|---|
| Model | OTF1200XIIIR5 |
| Tube Diameter | 5 inch (127 mm) outer diameter fused quartz |
| Heating Zones | 3 zones (150 mm + 300 mm + 150 mm), total 600 mm |
| Max Working Temperature | 1150°C (up to 30 minutes), 1100°C continuous |
| Temperature Control | Three PID controllers, 30 programmable segments, RS485 port |
| Tube Rotation Speed | 0–10 RPM variable, DC gear motor (torque 10 Nm) |
| Furnace Tilt Angle | -5° to 20° electrically controlled |
| Automatic Feeding Rate | Up to 97 cm³/min, vacuum-sealed swivel coupling |
| Receiving Tank Capacity | 1 Liter stainless steel with KF40 butterfly valve |
| Power Supply | 208–240 VAC, single phase, 5 kW (30 A breaker required) |
| Insulation | High purity alumina fibrous insulation |
| Atmosphere Pressure Limit | Below 3 psig (0.2 bar), suitable for vacuum and low pressure |
Typical Applications
This furnace is optimized for continuous thermal processing and CVD coating of lithium-ion battery electrode powders, enabling uniform conductive coatings on cathode and anode materials. It is also applicable for research and development of advanced battery materials requiring controlled atmosphere and precise temperature profiles.
Configuration & Operating Notes
The automatic feeding and receiving system is mounted via a vacuum-sealed swivel assembly to maintain an inert atmosphere during powder transfer. The receiving tank features a KF40 butterfly valve for hermetic sealing during loading and unloading. Optional accessories include a stainless steel SS310 tube rated for up to 900°C, touchscreen control panel, and laptop-based LabVIEW temperature control software for advanced recipe management and data logging.
Users must ensure gas supply pressure is regulated below 3 psi with a two-stage regulator for safe operation. Quartz tubes are recommended for vacuum or low-pressure use up to 1000°C. The furnace’s split cover design facilitates faster cooling and easier maintenance.
