VTC-100PAX Ultra-High Speed Spin Coater with Vacuum Chuck for Up to 5″ Wafers
The VTC-100PAX is engineered to meet the demands of high-precision thin film deposition on substrates with diameters up to 5 inches. It is especially suited for applications requiring uniform coating thickness and controlled environmental conditions, such as semiconductor wafer processing and advanced material research. The device supports substrates ranging from 10 mm to 5 inches, held securely by vacuum chucks to accommodate thin or delicate samples.
This spin coater utilizes a precision DC servo motor capable of spinning up to 12500 rpm, with a maximum of 13000 rpm for short durations under 60 seconds. The system offers programmable control over spin speed, acceleration, and duration through an LCD interface, allowing up to 12 user-defined programs with 6 segments each. The corrosion-resistant polypropylene chamber and integrated gas inlet port enable coating under inert atmospheres such as argon, making it compatible with glovebox environments.
주요 기능
- Programmable spin speed range from 500 to 12500 rpm, with up to 13000 rpm for brief periods.
- Vacuum chuck system with two aluminum chuck sizes to hold substrates from 20 mm to 100 mm diameter.
- Corrosion-resistant polypropylene chamber suitable for cleanroom and glovebox use.
- Integrated 6 mm gas inlet port for inert gas flow during coating processes.
- Digital control panel stores up to 12 programs, each with 6 segments for speed, acceleration, and duration.
- Includes a 20 ml plastic syringe with needle for liquid dispensing; optional precision pipettes and heating accessories available.
- Safety interlock integrated into the lid for secure operation.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Maximum Spin Speed | 12500 rpm (13000 rpm max for <60 seconds) |
| Spin Speed Range | 500 to 12500 rpm programmable |
| Acceleration Range | 100 to 2000 rpm/sec adjustable |
| Speed Accuracy | Less than 5% |
| Substrate Size | 10 mm to 5 inches diameter |
| Vacuum Chuck Sizes | Two aluminum chucks for 20 mm to 100 mm diameter substrates |
| Chamber Material | Polypropylene (corrosion resistant) |
| Gas Inlet Port | 6 mm diameter for inert gas flow |
| Control Programs | 12 programs, each with 6 segments |
| Power Supply | Selectable AC 110V or 220V |
| Motor Type | 24 V DC high-speed servo motor |
| Included Accessories | 20 ml plastic syringe with needle |
대표적인 적용 분야
The VTC-100PAX is ideal for thin film coating processes in semiconductor fabrication, microelectronics, and materials science research. Its vacuum chuck and inert gas compatibility make it suitable for coating delicate substrates and performing processes in controlled atmospheres such as gloveboxes filled with argon gas.
구성 및 작동 안내
Optional accessories include a compact oilless vacuum pump (to be placed outside the glovebox) and feedthroughs for vacuum integration. Additional liquid dispensing options such as precision electronic pipettes and heatable glass syringes with temperature control are available. The device incorporates a safety interlock on the lid to prevent operation when open. Users should avoid over-flushing the water bowl to prevent damage to the motor shaft and follow recommended cleaning procedures to maintain device longevity.
