OTF-1200X-III-R5L-LVC4 5-Inch Rotary CVD Tube Furnace with 3 Heating Zones and 4-Channel Gas Delivery System
The OTF-1200X-III-R5L-LVC4 is engineered to facilitate uniform coating of battery powders, including both anode and cathode materials, through chemical vapor deposition (CVD). This rotary tube furnace is particularly suited for research and development as well as pilot-scale production, bridging the gap between laboratory experiments and larger-scale manufacturing processes.
Its design incorporates a 5-inch diameter fused quartz processing tube that rotates at variable speeds up to 10 revolutions per minute, ensuring homogeneous treatment of materials. The furnace features three independently controlled heating zones spanning a total length of 600 mm, allowing precise temperature profiling with an accuracy of ±1°C. The system supports continuous operation at 1100°C, with the capability to reach 1200°C for short periods under controlled conditions.
주요 기능
- Three heating zones (150 mm, 300 mm, 150 mm) with programmable temperature controllers for independent control.
- Rotary quartz tube driven by a DC gear motor with adjustable speed from 0 to 10 RPM.
- 4-channel precision gas delivery system with mixing capability for up to four gases, suitable for complex CVD processes.
- Double shell casing with alumina fibrous insulation and three cooling fans for energy efficiency and temperature stability.
- Electrical tilt function up to 30° to facilitate loading and unloading of samples.
- Vacuum capability down to 10-2 torr, supported by a mechanical vacuum pump and cold trap to protect the pump from CVD contaminants.
- Safety features include UL or Met recognized electrical components and compliance with international safety standards.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Maximum Continuous Temperature | 1100°C |
| Maximum Peak Temperature (≤1 hour) | 1200°C |
| Heating Zones | 3 zones (150 mm, 300 mm, 150 mm) |
| Temperature Accuracy | ±1°C |
| Tube Rotation Speed | 0–10 RPM variable |
| Processing Tube | Fused quartz, 130 mm O.D. × 120 mm I.D. × 700 mm length (included) |
| Gas Delivery System | 4-channel precision mixing with touch screen control |
| Vacuum Capability | Down to 10-2 torr with included mechanical pump and cold trap |
| Power Supply | 208–240 VAC, single-phase, 50/60 Hz, 4 kW max |
| Furnace Tilt Angle | 0–30° adjustable |
대표적인 적용 분야
This rotary tube furnace is ideal for producing homogeneous coated battery powders in research and development settings. It supports scalable synthesis of advanced electrode materials for lithium-ion and next-generation batteries, enabling process optimization before moving to full production scale.
구성 및 작동 안내
The furnace includes one fused quartz processing tube, a pair of stainless steel sealing flanges with needle valves, and a rotatable gas connector. Optional accessories include a touchscreen control panel and software packages for advanced temperature profile management. When using flammable gases, operation must be conducted in a fume hood equipped with appropriate gas detectors and approved by safety personnel. A two-stage pressure regulator is required to limit gas cylinder pressure below 3 PSI for safe operation. The quartz tube furnace is designed for vacuum and low-pressure environments below 0.2 bar (3 psi), with a vacuum pressure limit of 1000°C for quartz tubes.
Dimensions & Shipping
| Product dimensions | 130 mm O.D. x 120 mm I.D. x 700 mm L + 60 mm OD at two ends, Total Length: 1600 mm |
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