RF-600-LD UL/CSA Certified 600W RF Power Supply with Adjustable Frequency up to 60 MHz
The RF-600-LD power supply is engineered to deliver stable and precise radio frequency power for various laboratory and industrial processes requiring RF energy. It is capable of continuous output power up to 600 watts, making it suitable for applications such as plasma generation, thin film deposition, and other RF-driven processes. The unit supports selectable frequencies from 400 kHz to 60 MHz, allowing users to tailor the RF output to specific process requirements.
Designed with compliance to international safety standards including EN 61010-1:2010, UL 61010-1:2012, and CSA C22.2 No. 61010-1:2012, the RF-600-LD ensures safe operation in demanding environments. It features a robust construction with forced air cooling and standard 19″ EIA rack mounting compatibility. The power supply maintains excellent output stability and accuracy, with a rise time under 200 milliseconds and frequency stability within ±0.005%.
주요 기능
- Continuous forward power output up to 600 W into a 50 Ohm load
- Adjustable frequency options: 400 kHz, 2 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz, and 60 MHz
- Power output accuracy of ±2 W or ±1% of set-point from 10% to 100% output
- Short-term stability of ±1% over one hour and long-term stability of ±3% over three years
- Fast rise time less than 200 ms from enable signal to 90% power level
- Compliant with UL, CSA, and EN safety standards with TUV certification
- Standard 19″ rack mount design with forced air cooling
기술 사양
| 매개변수 | 사양 |
|---|---|
| AC Input Voltage | 208 VAC; single phase with ground, no neutral |
| AC Line Frequency | 50/60 Hz nominal |
| AC Input Current | 10 A typical at 208 V |
| Output Power | Up to 600 W continuous forward power into 50 Ohm load |
| Power Accuracy/Regulation | ±2 W or ±1% of set-point (whichever is greater) from 10% to 100% output |
| Short Term Stability | ±1% over one continuous hour |
| Long Term Stability | ±3% over three years continuous operation |
| Rise Time | Less than 200 ms to 90% power level |
| Frequency Range | 400 kHz to 60 MHz selectable |
| Frequency Stability | ±0.005% |
| Output Filtering | Harmonics & Spurious signals less than -40 dBc; AM & FM noise less than -40 dBc at 50 kHz offset |
| Signal Input Impedance | Minimum 10 kOhms |
| Signal Input Isolation | Minimum 1000 VDC to AC supply line |
| Control I/O Connector | 15-pin subminiature D-type (female) and 5-pin micro style DeviceNet (male) |
| Output Power Connector | Type N female coaxial connector |
| Mechanical Dimensions | 8.5″ W x 5.25″ H x 18.5″ D (21.6 cm x 13.4 cm x 46.9 cm) |
| Mounting | Standard 19″ EIA rack mount with ½ rack filler panel |
| Cooling | Forced air cooling |
| 작동 온도 | +10 to +40 °C ambient, 5-85% relative humidity (non-condensing) |
| Storage Temperature | -25 to +70 °C, 5-95% humidity (non-condensing) |
| Safety Compliance | EN 61010-1:2010, UL 61010-1:2012, CSA C22.2 No. 61010-1:2012, TUV certified |
대표적인 적용 분야
The RF-600-LD is suitable for RF power delivery in plasma generation, semiconductor processing, thin film deposition, and other laboratory or industrial processes requiring stable RF excitation. Its adjustable frequency range and power output make it adaptable for various RF-driven equipment and experimental setups.
구성 및 작동 안내
The unit includes a rear panel Harting HAN 5Q power connector and standard control interfaces including RS232 and DeviceNet connectors. Optional accessories may include mating connectors and strain relief components as specified. Forced air cooling requires appropriate ventilation. Users should ensure load impedance remains near 50 Ohms to maintain output accuracy and prevent reflected power exceeding 100 W.
