OTF-1200X-50-DFSL Dual 50mm Tube Furnace System with Automatic Sliding Furnace for 1200°C TMDs Growth
The OTF-1200X-50-DFSL is engineered for advanced laboratory synthesis of two-dimensional transition metal dichalcogenides (TMDs) via chemical vapor deposition (CVD). This system integrates two 50 mm diameter quartz tube furnaces arranged in tandem, enabling precise control over precursor sublimation and material deposition processes essential for high-quality TMD growth.
The left furnace remains stationary and is dedicated to sublimating solid precursors, while the right furnace incorporates an automatic sliding mechanism. This sliding furnace can rapidly move along a 300 mm rail, facilitating swift heating and cooling cycles by physically shifting the heating zone relative to the sample. This design achieves effective temperature changes near 100°C per minute, enhancing process flexibility and throughput.
주요 기능
- Dual independent temperature controllers allow separate regulation of sublimation and deposition zones without thermal interference.
- Sliding furnace equipped with dual 200 mm heating zones and a 70 mm constant temperature zone (±2°C) for uniform processing.
- Stationary furnace features a 200 mm heating zone with a 60 mm constant temperature zone (±1°C).
- Maximum operating temperature up to 1200°C for short durations; continuous operation at 1100°C.
- High-purity fused quartz tube (50 mm OD × 44 mm ID × 1200 mm length) supports vacuum and low-pressure operation up to 0.2 bar.
- Programmable sliding control with 24V DC motor supports manual and automatic modes integrated with temperature control.
- PID temperature controllers with auto-tune, 30 programmable segments, and built-in safety alarms included.
기술 사양
| 매개변수 | 사양 |
|---|---|
| 최고 기온 | 1200°C (less than 1 hour) |
| Continuous Operating Temperature | 1100°C |
| Maximum Temperature Under Vacuum | 1000°C |
| Heating Rate | Up to 20°C/min (furnace heating); effective ~100°C/min via sliding |
| Tube Dimensions | 50 mm OD × 44 mm ID × 1200 mm length, fused quartz |
| 최대 압력 | 0.2 bar (3 PSIG) |
| Gas Flow Rate | Up to 1000 SCCM |
| Heating Elements | Molybdenum-doped Fe-Cr-Al alloy |
| Thermocouple Type | Type K |
| Sliding Distance | 300 mm |
| Power Supply | AC 110–120V, single phase, 50/60 Hz (208–240V optional) |
| Power Consumption | Sliding furnace 1.5 kW; Stationary furnace 1.2 kW; Sliding motor 0.2 kW |
대표적인 적용 분야
This dual-furnace system is optimized for chemical vapor deposition growth of two-dimensional TMD materials, enabling controlled sublimation of solid precursors and precise deposition conditions. It is suitable for research in nanomaterials, semiconductor device fabrication, and advanced materials development requiring rapid thermal cycling and high temperature uniformity.
구성 및 작동 안내
The system includes PID temperature controllers with auto-tune and safety alarms. Optional upgrades include Eurotherm controllers with ±0.1°C accuracy and water-cooled vacuum flanges. The sliding furnace motor supports both manual and automatic programmable sliding integrated with temperature control. Vacuum pumps and gas mixing modules are available separately. Users must install a two-stage pressure regulator on gas cylinders to maintain safe operating pressures below 3 PSI. Protective heat-resistant gloves and clothing are recommended during rapid cooling by sliding the furnace away from the tube. The quartz tube and flanges are designed for vacuum and low-pressure operation below 0.4 bar.
Dimensions & Shipping
| Product dimensions | 50 mm OD × 44 mm ID × 1200 mm L |
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