MFC-7B Nitrogen-Calibrated Mass Flow Controller up to 5000 sccm for Gas Flow Regulation in CVD/PECVD Systems
The MFC-7B is engineered to provide accurate and reliable control of gas flow rates in laboratory chemical vapor deposition (CVD), plasma-enhanced CVD (PECVD), and graphene furnace processes. It is primarily calibrated for nitrogen gas, ensuring precise flow regulation essential for research and development applications involving gas mixtures and vacuum coating techniques.
This mass flow controller is designed as a replacement component compatible with MTI multiple channel gas control systems. It features a normally closed valve configuration and supports flow rates up to 5000 standard cubic centimeters per minute (sccm) of nitrogen. The device operates with a differential pressure range of 0.1 to 0.5 MPa and can withstand a maximum pressure of 3 MPa, making it suitable for various controlled atmosphere environments.
주요 기능
- Calibrated for nitrogen with ±1.5% full scale accuracy and ±0.2% repeatability.
- Flow range options include 100, 200, 500, 1000, 2000, and 5000 sccm; custom ranges available on request.
- Response time of 10 seconds or less for rapid flow adjustments.
- Standard D-sub 15 pin male electronic connector for seamless integration.
- Swagelok 1/4″ fittings compatible with MTI furnace gas delivery systems.
- Valve is normally closed to ensure safety and controlled gas delivery.
- Seals made from Viton and Neoprene for chemical resistance and durability.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Full Scale Range (N2) | 100, 200, 500, 1000, 2000, 5000 sccm (custom ranges available) |
| Accuracy | ±1.5% Full Scale |
| Repeatability | ±0.2% Full Scale |
| Linearity | ±1% Full Scale |
| Response Time | ≤10 seconds |
| Valve Configuration | Normally Closed |
| 작동 온도 | Up to 545°C |
| Input Signal | 0-5 VDC |
| Output Signal | 0-5 VDC |
| Power Supply | +15 V 50 mA; -15 V 200 mA |
| Electronic Connector | D-sub 15 pins male |
| Differential Pressure Range | 0.1 to 0.5 MPa |
| 최대 압력 | 3 MPa |
| Leak Integrity | 1×10⁻⁸ atm·cc/sec He |
| Seal Materials | Viton, Neoprene |
| Fittings | Swagelok 1/4″ |
대표적인 적용 분야
The MFC-7B is ideal for regulating gas flow in vacuum coating processes, CVD and PECVD reactors, and graphene furnace systems where precise gas mixture control is critical. It is used extensively in research environments requiring stable and repeatable gas delivery.
구성 및 작동 안내
This model is supplied without a display and intended as a replacement part for MTI gas mixing and delivery systems. To operate the MFC-7B independently, an additional MFC-COM controller interface must be ordered separately. Calibration for gases other than nitrogen can be approximated using conversion factors provided by the manufacturer or requested as a custom calibration with extended lead time.
