GSL-3F-PTFE Three-Channel Anti-Corrosion Gas Mixing Control Station with PTFE Components for Corrosive Gas Delivery
The GSL-3F-PTFE is engineered to address the challenges of handling highly corrosive gases such as hydrogen sulfide (H2S) and hydrogen selenide (H2Se) in chemical vapor deposition (CVD) applications. Its design ensures chemical resistance and durability by utilizing polytetrafluoroethylene (PTFE) for all components that come into contact with gases, thereby minimizing corrosion risks and contamination.
This system integrates three independent gas channels that can be precisely controlled and mixed. Two gas streams combine in a PTFE mixing tank with a 1000 mL capacity before delivery, while the third channel remains independent, allowing flexible gas flow configurations. The station is mounted on a mobile cart suitable for laboratory environments, facilitating easy placement and integration with tube furnaces or other processing equipment.
주요 기능
- Three floating flow meters made entirely of PTFE, each supporting flow rates from 10 to 1000 mL/min for accurate gas measurement.
- Three PTFE needle valves located on the front panel enable precise manual control of gas flow for each channel.
- A 1000 mL PTFE gas mixing tank where two gas channels combine to ensure homogeneous mixing before output.
- PTFE pipe fittings compatible with 1/4″ tubing (nylon or stainless steel) for gas inlet and outlet connections.
- Mobile heavy-duty cart with four wheels and brakes, designed to support additional equipment such as small furnaces on top.
- Includes 12-foot length of 1/4″ PTFE tubing for immediate setup and operation.
- Optional oxygen sensor capability for monitoring oxygen levels in gas streams to prevent oxidation during CVD processing.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Flow Meter Type | Floating flow meter made of PTFE |
| Flow Rate Range | 10 – 1000 mL/min per channel |
| Valves | Three PTFE needle valves on front panel |
| Gas Mixing Tank Volume | 1000 mL PTFE tank |
| Pipe Fittings | PTFE fittings for 1/4″ tubing (nylon or stainless steel compatible) |
| Gas Inlets | Three inlets on right side of cart |
| Gas Outlets | Two outlets on left side (one mixed, one independent) |
| Included Tubing | 12 ft of 1/4″ PTFE pipe |
| Mobile Cart Dimensions | 600 mm (L) x 600 mm (W) x 650 mm (H) |
대표적인 적용 분야
This gas mixing station is ideal for laboratory CVD processes requiring the safe and precise delivery of corrosive gases such as H2S and H2Se. It supports research and development in thin film deposition, semiconductor fabrication, and materials science where chemical resistance and accurate gas blending are critical.
구성 및 작동 안내
Users should consider integrating PTFE flanges on tube furnaces when processing corrosive gases to maintain system integrity. Additionally, pairing this station with an anti-corrosion dry vacuum pump is recommended to avoid damage associated with oil-based pumps. The oxygen sensor option can be installed to monitor oxygen contamination and reduce oxidation risks during processing.
