GSL-1200XS15-ASD Automated Tube Furnace with Robotic Sample Handling, 1200°C Max, Ø400 mm Quartz Tube for AI Material Research
The GSL-1200XS15-ASD is engineered to facilitate fully automated high-temperature sintering processes for research applications, particularly in AI materials development. It accommodates large-diameter quartz tubes (Ø400 mm) and achieves peak temperatures up to 1200°C for short durations, with continuous operation capability below 1100°C. This furnace integrates robotic assistance to automate sample loading, unloading, and process control, enabling high-throughput experimentation with minimal manual intervention.
The system’s PC-based software allows users to program complex thermal cycles with up to 50 temperature segments, including ramping, dwelling, and cooling phases. It supports vacuum generation, gas purging, and steady gas flow control, all coordinated with automated flange door operation. Multiple units can be managed simultaneously from a single PC, allowing continuous 24/7 operation and remote monitoring capabilities.
주요 기능
- Automated sample handling with optional robotic arm for loading and retrieval, supporting loads up to 5 kg with ±0.02 mm accuracy.
- Heating chamber with FeCrAl-Mo doped elements and K-type thermocouple, providing uniform temperature over a 120 mm zone at ±5°C.
- Quartz tube (Ø400 × 900 mm) constructed from high-purity quartz; consumable and replaceable.
- PID programmable temperature controller with ±1°C accuracy and up to 50 programmable segments.
- Integrated vacuum and gas handling system including KF25 vacuum port, gas inlet/outlet fittings, and chilled water cooling for flange sets.
- Motorized sliding sample stage for precise sample positioning during loading and unloading.
- PC software enabling one-touch operation, multi-cycle programming, and data logging of pressure, cycles, and purging parameters.
기술 사양
| 매개변수 | 사양 |
|---|---|
| 최고 기온 | 1200°C (≤30 min), continuous below 1100°C |
| Heating Area Length | 460 mm |
| 온도 균일도 | ±5°C over 120 mm |
| Heating Rate | ≤10°C/min |
| Heating Elements | FeCrAl-Mo doped |
| Thermocouple Type | K-type |
| Tube Material and Size | High-purity quartz, Ø400 × 900 mm |
| Power Supply | AC 380V ±10%, 3 phase, 50/60 Hz, 15 kW; 208–240VAC, 50/60 Hz |
| Temperature Controller | PID programmable, ±1°C accuracy, up to 50 segments |
| Vacuum Capability | Mechanical pump: 10⁻² torr; Turbo pump: 10⁻⁵ torr |
| Robotic Arm (Optional) | 48VDC, 150W, max load 5 kg, accuracy ±0.02 mm |
| Sample Stage Options | Quartz crucible stage (17 crucibles Ø40×30 mm) or wafer holder stage (30–35 wafers 8×8″) |
| Flange Set Features | Water inlet/outlet, gas inlet/outlet fittings, quick-connect temperature port, KF25 vacuum port with digital gauge |
대표적인 적용 분야
This furnace is ideal for automated sintering and thermal processing in AI material research, semiconductor wafer treatment, and advanced ceramics development. Its integration with robotic handling and programmable gas/vacuum control supports high-throughput synthesis and testing workflows.
구성 및 작동 안내
The system includes a motorized sliding sample stage and can be optionally equipped with a robotic arm for fully automated sample transfer. The quartz tube is consumable and must be replaced as needed. The furnace requires chilled water cooling for the flange assembly. Control software is PC-based and may be purchased separately. Safety precautions should be observed when operating at high temperatures and under vacuum conditions.
