OTF-1200X-III-80-F3LV Three Zone Quartz Tube Furnace with 1200°C Max, 3-Channel Gas Mixer, Vacuum Pump & Corrosion-Resistant Vacuum Gauge
The OTF-1200X-III-80-F3LV is engineered for advanced laboratory applications requiring controlled atmosphere heat treatment, such as chemical vapor deposition (CVD) and diffusion processes. Its design accommodates precise temperature control across three separate heating zones within a quartz tube, enabling uniform thermal conditions or gradient profiles as needed. The furnace supports vacuum operation down to 10^-2 torr using an integrated mechanical rotary vane vacuum pump, complemented by a corrosion-resistant capacitance diaphragm vacuum gauge for reliable measurement even in aggressive gas environments.
This system incorporates a three-channel gas mixing unit, allowing simultaneous flow and mixing of up to three different gases with individual flow meters and pressure gauges. The quartz tube, measuring 80 mm outer diameter and 1400 mm length, is housed within a double-layer steel casing with alumina fiber insulation for energy efficiency. The furnace cover is splittable, facilitating easy tube replacement and maintenance.
Wichtigste Merkmale
- Three independently controlled heating zones totaling 880 mm length, with ±1°C temperature accuracy and PID control.
- Maximum operating temperature of 1200°C with continuous operation at 1100°C.
- Mechanical rotary vane vacuum pump included, achieving vacuum levels down to 10^-2 torr; compatible with molecular pumps for deeper vacuum.
- Corrosion-proof capacitance diaphragm vacuum gauge with ceramic-coated sensor head for aggressive gases, measuring 10^-5 to 1000 torr.
- Three gas flow meters with ranges 10-100, 16-160, and 25-250 cc/min for precise gas mixing control.
- Double-layer steel casing with air cooling and high-purity alumina fiber insulation for energy saving.
- RS485 communication port and optional PC control modules for automated temperature profile programming and data logging.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Furnace Type | Splittable three zone quartz tube furnace |
| Quartz Tube Dimensions | 80 mm OD × 72 mm ID × 1400 mm length |
| Höchsttemperatur | 1200°C |
| Continuous Operating Temperature | 1100°C |
| Heizzonen | 3 zones (220 mm + 440 mm + 220 mm) |
| Temperaturgenauigkeit | ±1 °C |
| Erwärmungsgeschwindigkeit | ≤ 20°C/min |
| Heizelemente | Fe-Cr-Al alloy doped with Mo |
| Temperaturregelung | Three PID controllers with 30 programmable segments, overheating and thermocouple break protection |
| Vakuumpumpe | 120 L/min rotary vane mechanical pump, max vacuum ~10^-2 torr |
| Vakuummeter | Corrosion-resistant capacitance diaphragm gauge, 10^-5 to 1000 torr range |
| Gas Flow Meters | Three channels: 10-100, 16-160, 25-250 cc/min |
| Stromverbrauch | 5 kW |
| Eingangsspannung | AC 208-240 V, single phase, 50/60 Hz |
Typische Anwendungsbereiche
This furnace system is ideal for CVD processes, diffusion experiments, annealing under controlled atmospheres, and vacuum heat treatments requiring precise temperature gradients and gas mixing. It is suitable for research in materials science, semiconductor fabrication, and thin film deposition.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes vacuum flanges with valves and pressure gauges, and stainless steel flanges for vacuum sealing. The mechanical pump is connected via stainless steel hose tubing. Optional accessories include a sliding flange with sample holder for manual sample transfer and PC control modules for automated operation and data acquisition. Users should limit gas flow rates below 200 SCCM to avoid thermal shock to the quartz tube and install two-stage pressure regulators on gas cylinders to maintain safe operating pressures below 3 PSI. Vacuum operation is recommended up to 1000°C to ensure system integrity.
