OTF-1200X-80-F3LV Single Zone Tube Furnace with 80mm Quartz Tube, 1200°C Max, 3-Channel Gas Mixer, Vacuum Pump, and Corrosion-Resistant Vacuum Gauge
The OTF-1200X-80-F3LV is engineered for laboratory applications requiring precise thermal processing under controlled atmospheres, such as chemical vapor deposition (CVD) and diffusion experiments. Its single heating zone accommodates an 80 mm outer diameter quartz tube, providing a uniform temperature environment up to 1200°C. This setup supports continuous operation at 1100°C with a stable temperature accuracy of ±1°C, ensuring reproducible thermal conditions.
This system integrates a mechanical double-stage rotary vane vacuum pump capable of reaching vacuum levels down to 10⁻² torr, facilitating low-pressure processing. The furnace includes a three-channel gas flow system with individual flow meters and stainless steel valves, allowing precise mixing and control of up to three different gases. An anti-corrosive capacitance diaphragm vacuum gauge with a ceramic-coated sensor head enables reliable vacuum measurement even in the presence of aggressive gases.
Wichtigste Merkmale
- Single zone tube furnace with 80 mm diameter quartz tube and 400 mm heating zone length.
- Maximum temperature of 1200°C with ±1°C accuracy and PID automatic SCR power control.
- Mechanical double-stage rotary vane vacuum pump included, achieving vacuum down to 10⁻² torr.
- Three-channel gas mixer with flow meters (10-100, 16-160, 25-250 cc/min) and stainless steel valves for precise gas control.
- Corrosion-resistant capacitance diaphragm vacuum gauge with ceramic-coated sensor for aggressive gas environments.
- Double-layer steel casing with air cooling and automatic thermostat-controlled cooling system.
- RS485 communication port for integration and optional advanced temperature control software available.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Ofenbau | Double layer steel casing with air cooling and built-in thermostat for cooling activation above 55°C |
| Stromverbrauch | 2.5 kW |
| Eingangsspannung | AC 208-240V, Single Phase, 50/60 Hz |
| Höchsttemperatur | 1200 °C |
| Continuous Working Temperature | 1100 °C |
| Maximum Heating Rate | ≤ 20 °C/min |
| Heating Zone Length | 400 mm |
| Konstanttemperaturzone | 150 mm (±1 °C) |
| Temperaturgenauigkeit | ±1 °C |
| Heizelemente | Fe-Cr-Al alloy doped with Mo |
| Temperaturregler | PID automatic SCR power control with phase angle firing, 30 programmable segments, built-in auto-tune, over-temperature protection, RS485 port |
| Tube Dimensions | Quartz tube OD 80 mm × ID 75 mm × Length 1000 mm |
| Vakuummeter | Corrosion-proof capacitance diaphragm gauge with ceramic-coated sensor, measuring range 10⁻⁵ to 1000 torr |
| Vakuumpumpe | 156 L/min double-stage rotary vane pump, max vacuum ~10⁻⁴ torr |
| Gas Flow Meters | Three flow meters: 10-100 cc/min, 16-160 cc/min, 25-250 cc/min (±4% full scale) |
| Valves | Four stainless steel valves controlling three gas inlets |
Typische Anwendungsbereiche
Ideal for chemical vapor deposition (CVD), diffusion studies, thin film synthesis, and material processing requiring controlled atmospheres and precise temperature profiles under vacuum or mixed gases.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes a mobile cart housing the vacuum pump, gas flow meters, pressure meters, and valves for convenient operation and monitoring. Optional advanced temperature control software and laptop packages are available for enhanced process management and remote control. The vacuum gauge is specially designed to resist corrosion from aggressive gases, extending sensor life and measurement reliability. Users should ensure proper connection of stainless steel hoses and follow safety protocols when handling reactive gases and high temperatures.
