GSL2Z 2-9 Channel Gas Control System with PLC Touch Panel and PC Software for Precise Gas Flow Management in Tube Furnaces
The GSL2Z gas control system is engineered to deliver accurate and independent regulation of up to nine gas channels, specifically tailored for tube furnace setups. This system is particularly suited for chemical vapor deposition (CVD) processes where precise gas environment control is critical for material synthesis and research. The unit is mounted on a robust mobile cart, allowing the tube furnace to be conveniently positioned on top for integrated operation.
Each gas channel is managed by computerized mass flow controllers (MFCs) with selectable flow ranges from 0 to 5000 standard cubic centimeters per minute (SCCM), depending on configuration. The system incorporates a 6-inch color PLC touch screen for intuitive local control and also supports remote operation via RS485 communication through supplied PC software. This software enables programmable 16-segment control for each channel, facilitating complex gas flow profiles essential for advanced experimental protocols.
Wichtigste Merkmale
- Configurable for 2 to 9 independent gas channels with mass flow controllers.
- Integrated 6″ color PLC touch screen for easy parameter setting and monitoring.
- Remote PC control via RS485 port with dedicated MTS-03 software supporting programmable gas flow segments.
- High accuracy mass flow control with ±1.5% full scale accuracy and ±0.2% repeatability.
- Built-in stainless steel gas mixing tank and internal stainless steel/PTFE gas pipelines ensure chemical compatibility and durability.
- Mechanical pressure gauge (-0.1 to 0.15 MPa) and 316 stainless steel needle valves for precise manual adjustments.
- CE certified components with optional certifications (TUV, UL61010, CSA) available.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Number of Gas Channels | 2 to 9 (customizable) |
| Mass Flow Controller Ranges | 0-100, 1-200, 1-500, 1-1000, 1-2000, 1-5000 SCCM selectable |
| Accuracy | ±1.5% Full Scale |
| Linearity | ±1% Vollausschlag |
| Repeatability | ±0.2% Full Scale |
| Betriebstemperatur | 5 to 45 °C |
| Maximaler Druck | 3×10⁶ Pa |
| Stromversorgung | AC 110-240 V, Single Phase, 50/60 Hz |
| Stromverbrauch | 23 W |
| Touch Screen | 6″ Color PLC Touch Panel |
| Kommunikationsschnittstelle | RS485 Port |
| Gas Mixing Tank Dimensions | Ø80 × 120 mm |
| Gas Pipeline Materials | Internal: 1/4″ O.D stainless steel and PTFE; External: 1/4″ O.D PTFE |
| Stop Valve and Fittings | 316 Stainless Steel Needle Valve, 1/4″ Swagelok Tube Fitting |
| Mechanical Pressure Gauge Range | -0.1 to 0.15 MPa |
Typische Anwendungsbereiche
This gas control system is ideal for research and development involving chemical vapor deposition (CVD) furnaces, where precise and programmable gas flow control is essential to study the effects of gas environments on material properties. It can also be used in other tube furnace processes requiring multi-gas mixing and accurate flow regulation.
Hinweise zur Konfiguration und zum Betrieb
The system includes a heavy-duty mobile cart with integrated gas mixing tank and stainless steel/PTFE pipelines. Optional oxygen sensors are available to monitor oxygen levels during CVD processes to prevent oxidation. Users should allow approximately 15 minutes for the system to warm up before initiating gas flow. Remote control is facilitated via supplied PC software, though it is currently not compatible with LabVIEW. Additional mass flow controller ranges and certifications can be requested as needed.
Maße & Versand
| Product dimensions | 600mm(L) x 855mm(W) x 700mm(H) |
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