VTC100B-UV Programmable Spin Coater with 365 nm UV Curing Cover for 3″ Wafers, 60-9999 RPM
The VTC100B-UV is engineered for laboratory spin coating tasks requiring precise and uniform thin film deposition on small substrates ranging from 30 mm to 70 mm in diameter. It is especially suited for applications involving 3-inch wafers or similar small flat materials. The system integrates a programmable spin coater with a UV curing chamber, enabling simultaneous coating and ultraviolet curing processes to enhance coating quality and throughput.
This benchtop unit features a nylon anti-corrosive chamber and vacuum chucks powered by an oil-less vacuum pump to securely hold substrates during high-speed rotation. The vacuum chucks come in three O-ring sizes (14 mm, 22 mm, and 35 mm) to accommodate various substrate shapes and sizes within the specified diameter range. The syringe holder is adjustable in height and rotation, facilitating precise liquid dispensing during coating.
Key Features
- Programmable spin speed from 60 to 9999 rpm with acceleration adjustable between 5 and 2000 rpm/sec.
- Touchscreen control panel supports up to 10 programmable steps and storage of 9 coating programs.
- Integrated 365 nm UV LED lights mounted on the cover for in-situ curing during or after coating.
- Vacuum chuck system with three interchangeable O-ring sizes for substrate diameters between 30 mm and 70 mm.
- Nylon chamber and vacuum components provide corrosion resistance for various coating chemistries.
- Gas inlet port (6 mm diameter) allows introduction of inert or reactive gases during coating processes.
- Standard 20 ml plastic syringe with needle included; optional precision electronic pipette and heatable glass syringe available.
Technical Specifications
| Parameter | Specification |
|---|---|
| Substrate Diameter Range | 30 mm to 70 mm |
| Spin Speed | 60 to 9999 rpm, programmable |
| Acceleration | 5 to 2000 rpm/sec |
| Spin Duration | Up to 99 hours |
| Control Interface | Touchscreen panel with program storage (up to 9 programs) |
| Vacuum Chuck Material | Nylon, anti-corrosive |
| Vacuum Pump | Oil-less integrated pump |
| UV Curing Light | 365 nm UV LED on cover |
| Gas Inlet Port | 6 mm diameter for inert or reactive gases |
| Power Supply | AC 110V or 220V, 50Hz, single phase (selectable) |
Typical Applications
Ideal for spin coating photoresists, polymers, and other thin film materials on small wafers or substrates in research and development, semiconductor processing, and materials science laboratories. The integrated UV curing enables rapid polymerization or cross-linking of coatings immediately after deposition.
Configuration & Operating Notes
The standard package includes three vacuum chucks with different O-ring sizes and a 20 ml plastic syringe with needle for liquid dispensing. Optional accessories include a precision electronic single-channel pipette (20-200 µL) and a heatable glass syringe with temperature control up to 200°C. The nylon chamber and vacuum components resist corrosion from various coating solutions.
Users should avoid overfilling the water bowl/base to prevent liquid damage to the motor shaft. Cleaning instructions recommend using a fabric cloth to remove residues and opening the water outlet during flushing to avoid overflow. Safety features are incorporated to protect operators from high-speed rotation hazards and spillage.
Dimensions & Shipping
| Product dimensions | 400 x 275 x 331 mm (L x W x H) |
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