VTC-300USS Ultrasonic Spin-Spray Coater for Uniform Liquid-Phase Coating on Up to 12″ Substrates
The VTC-300USS is engineered to facilitate uniform liquid-phase coatings on large substrates, accommodating diameters up to 12 inches or 8-inch squares. It is particularly suited for applications requiring dense and consistent films, such as low-temperature precipitation processes, polymer coatings, and composite material deposition on both flat and patterned surfaces.
This system integrates spin coating with ultrasonic spray technology, enabling precise control over coating uniformity. The spin coater features a vacuum chuck with adjustable holders to secure substrates during processing, while the ultrasonic spray nozzle, mounted on a swing arm, delivers atomized liquid assisted by compressed air. A heatable syringe pump supplies the coating fluid, and optional heat lamps provide substrate heating to optimize coating conditions.
Key Features
- Spin speed adjustable from 300 to 3000 rpm; recommended max 2000 rpm for substrates larger than 8″
- Vacuum chuck with oil-less pump holds flat substrates up to 12″ diameter or 8″ square
- Two ultrasonic spray nozzles included: cylindrical (~20 mm spray diameter) and cone (~40 mm spray diameter)
- Compressed air-assisted spray with integrated flow meter; recommended air pressure ~2 psi for aqueous solutions
- Heatable syringe pump with LCD touch control, accommodating syringes 0.4–30 mm diameter, pumping rates 0.001–20 mm/min
- Built-in swing arm for ultrasonic nozzle with adjustable speed and movement range
- Optional dual heat lamps for substrate heating up to 65 ºC (with 12″ metal substrate)
Technical Specifications
| Parameter | Specification |
|---|---|
| Maximum Substrate Size | 12″ diameter or 8″ square |
| Spin Speed Range | 300 – 3000 rpm (recommended max 2000 rpm for >8″ wafers) |
| Vacuum Chuck | Oil-less pump included, adjustable substrate holders |
| Ultrasonic Spray Nozzles | Two nozzles: cylindrical (~20 mm spray), cone (~40 mm spray) |
| Compressed Air Pressure | ~2 psi recommended for aqueous solutions |
| Fluid Viscosity Range | 1 – 100 mPa·s (cP) |
| Syringe Pump Capacity | Accommodates syringes 0.4 – 30 mm diameter; includes 20 mL syringe |
| Pumping Rate | 0.001 – 20 mm/min adjustable |
| Syringe Heater | Polyimide heater with 30 segments, programmable up to 75 ºC |
| Power Supply | 208 – 240 VAC, 50/60 Hz, 3000 W total |
Typical Applications
The VTC-300USS is ideal for depositing uniform coatings in research and development of RF/microwave ferrites, polymer films, powders, and composite materials. It supports coating on both flat and patterned or uneven substrates, making it suitable for advanced material fabrication and thin film research.
Configuration & Operating Notes
The system includes a vacuum chuck with an oil-less pump, two ultrasonic spray nozzles with KF-25 adapters, a heatable syringe pump with a 20 mL syringe, and a swing arm for nozzle movement. Optional dual heat lamps can be added for substrate heating. For safety and optimal performance, operation within a fume hood is strongly recommended. When using a gas cylinder instead of an air compressor, a two-stage pressure regulator must be installed to maintain safe compressed air pressure.
Users should avoid overflushing the water bowl to prevent liquid damage to the motor shaft and consider substrate cleaning with plasma treatment prior to coating to improve film quality. Optional accessories include a compressive gas atomizing spray nozzle and customized multi-spray heads available upon request.
