VTC-100A Compact Spin Coater with 3 Vacuum Chucks for 4″ Wafers, 500-8000 RPM Variable Speed
The VTC-100A spin coater is engineered to facilitate uniform thin film deposition on substrates up to 4 inches in diameter, commonly used in semiconductor and materials research laboratories. It supports sol-gel coating processes by spinning the substrate at controlled speeds to achieve even distribution of coating solutions.
This compact unit features an aluminum casting housing that ensures stable rotation and durability. The coating area includes a polypropylene liquid disk resistant to corrosive chemicals, enhancing longevity and maintenance ease. The device is designed for quick setup and operation, with included accessories to enable immediate use upon delivery.
Key Features
- Variable spin speed range from 500 to 8000 rpm with two programmable segments for flexible coating protocols.
- Three polypropylene vacuum chucks (1″, 2″, and 4″) with o-rings to securely hold wafers of different sizes.
- Digital control panel for precise timing and speed adjustments, supporting spin times from 1 to 600 seconds.
- Adjustable and rotatable 20 mL syringe holder for controlled dispensing of coating materials.
- Aluminum casting case for stable operation and corrosion-resistant polypropylene liquid disk.
- Includes adhesive tape for securing irregularly shaped substrates during coating.
- Drainage outlet and vacuum pump connector located on the rear panel for convenient setup.
Technical Specifications
| Parameter | Specification |
|---|---|
| Maximum Wafer Diameter | 4 inches |
| Spin Speed Range | 500 – 8000 RPM |
| Spin Time Range | 1 – 600 seconds |
| Vacuum Chucks | 3 sets of PP vacuum chucks (1″, 2″, 4″) with o-rings |
| Liquid Disk Material | Polypropylene (PP) |
| Chamber Diameter | 145 mm |
| Motor Power | 24 V DC, 150 W max |
| Input Voltage | 24 V DC via 100-240 VAC adapter |
| Included Accessories | Vacuum chucks, plastic glass cover, 20 mL syringe, vacuum hose, drain hose, adhesive tape |
| Vacuum Pump | Not included; oil-less vacuum pump required separately |
| Certifications | CE certified |
Typical Applications
The VTC-100A is ideal for laboratories performing thin film coatings on semiconductor wafers, glass substrates, and other flat materials requiring uniform sol-gel or similar coatings. It supports research and development in microelectronics, optics, and materials science.
Configuration & Operating Notes
The unit includes three vacuum chucks to accommodate different wafer sizes and an adhesive tape for irregular substrates. A compatible oil-less vacuum pump is necessary but sold separately. Users should avoid overfilling the water bowl to prevent damage to the motor shaft and follow recommended cleaning procedures to maintain performance and longevity.
