MSK-AFA-H500SD 300mm Width Slot-Die Coater with SS316 Heated Vacuum Chuck up to 150°C for Uniform Thin Film Coating
The MSK-AFA-H500SD is engineered to facilitate the fabrication of uniform thin films on substrates measuring up to 400 mm in length and 380 mm in width. It is particularly suited for applications requiring precise control of film thickness, such as in the development of perovskite solar cells, fuel cells, and battery electrodes. The system integrates a slot-die coating mechanism capable of producing films ranging from 5 to 100 microns in thickness, ensuring versatility across various coating requirements.
This coater incorporates a robust vacuum chuck constructed from SS316 stainless steel alloy, featuring a perforation pattern with holes smaller than 1.0 mm. The chuck measures 500 mm by 400 mm and includes a bottom heater controlled digitally to maintain temperatures up to 150°C with an accuracy of ±1°C. This heating capability stabilizes the substrate temperature during coating, enhancing film uniformity and adhesion. The traverse mechanism allows adjustable coating lengths from 10 to 400 mm and speeds between 5 and 100 mm per second, providing fine control over the coating process.
Key Features
- Slot-die coater with 300 mm coating width and adjustable film thickness from 5 to 100 microns.
- Vacuum chuck made of corrosion-resistant SS316 alloy, sized 500 mm x 400 mm, with <1.0 mm perforations for secure substrate holding.
- Integrated bottom heater with digital temperature control up to 150°C ±1°C for substrate temperature stabilization.
- Traverse speed adjustable from 5 to 100 mm/sec and coating length adjustable from 10 to 400 mm for process flexibility.
- Slot-die fixture equipped with three precision rollers to ensure uniform coating without direct substrate contact.
- Gap between coating blade and substrate adjustable with ±1 micron accuracy via dual digital micrometers.
- Selectable power supply options: 110 V or 208–240 V AC, 50/60 Hz, 1.5 kW power consumption.
Technical Specifications
| Parameter | Specification |
|---|---|
| Coating Width | 300 mm |
| Substrate Size (Max) | 400 mm (L) x 380 mm (W) |
| Film Thickness Range | 5 to 100 microns |
| Vacuum Chuck Material | SS316 Stainless Steel Alloy |
| Vacuum Chuck Dimensions | 500 mm (L) x 400 mm (W) |
| Vacuum Chuck Hole Size | Less than 1.0 mm |
| Chuck Heating Temperature | Up to 150°C with ±1°C accuracy |
| Traverse Speed | 5 to 100 mm/sec (variable) |
| Traverse Length | 10 to 400 mm (adjustable) |
| Power Supply | Selectable 110 V or 208–240 V AC, 50/60 Hz, 1.5 kW |
| Slot-Die Gap Adjustment | ±1 micron accuracy via dual digital micrometers |
Typical Applications
This slot-die coater is ideal for producing uniform thin films in research and development of perovskite solar cells, fuel cells, and battery electrodes. It supports coating of slurries and solutions requiring precise thickness control and substrate heating for enhanced film quality.
Configuration & Operating Notes
The system includes the slot-die coater with vacuum chuck and heating elements. A vacuum pump is required but not included. Optional accessories include a digital syringe pump compatible with syringes up to 60 mL for controlled slurry dispensing, and a multi-slot-die fixture available at additional cost for complex coating patterns. Proper slurry viscosity and dispersion are critical for optimal coating performance; viscosity meters and dispersing machines are recommended as complementary tools.
