KSL-VMW-1400 Vacuum and Atmosphere Controlled Microwave Crucible Furnace with Water-Cooled Stainless Steel Chamber
The KSL-VMW-1400 is engineered for precise microwave sintering of air-sensitive and inert gas-compatible materials, offering a controlled environment for high-temperature processing up to 1400ºC. Its design addresses the challenge of maintaining material integrity during sintering by combining vacuum capability with inert gas atmosphere control within a robust water-cooled stainless steel chamber.
This furnace employs two perpendicular 1100W magnetrons operating at 2.45 GHz to deliver uniform microwave energy distribution. The chamber is sealed and equipped with ports and valves for vacuum and gas backfilling, enabling sintering under vacuum or inert atmospheres. However, operation above 500ºC requires backfilling with inert gas to prevent plasma formation, which could damage the chamber.
Key Features
- Water-cooled stainless steel (SS 304) vacuum chamber with front door and microwave shielding window.
- Dual 1100W magnetrons with water cooling for a total microwave power of 2200W.
- SiC foam heating elements acting as microwave susceptors for auxiliary heating.
- Programmable temperature controller with 30 segments, heating rates up to 50ºC/min, and ±1ºC control accuracy.
- Vacuum capability down to 10⁻² torr with optional mechanical pump and inert gas backfilling for high-temperature sintering.
- Includes one 40 mm diameter x 40 mm height alumina crucible (36 ml volume) inside the SiC susceptor.
- Safety features including over-temperature protection and thermocouple break detection.
Technical Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | Up to 1400ºC continuous |
| Heating Rate | Programmable 0 to 50ºC/min (rate decreases above 800ºC) |
| Microwave Power | 2200W total (two 1100W magnetrons) |
| Microwave Frequency | 2.45 GHz ±25 MHz |
| Microwave Leakage | ≤ 3 mW/cm² at 1 meter |
| Vacuum Capability | Down to 10⁻² torr with optional mechanical pump |
| Temperature Controller | Advanced SCR controller, 30 programmable segments, ±1ºC accuracy, auto-tune, over-temp and thermocouple break protection |
| Heating Elements | Silicon carbide (SiC) foam susceptor |
| Included Crucible | Alumina, 40 mm diameter x 40 mm height (36 ml volume) |
| Power Supply | 208-240 VAC, single-phase, 50/60 Hz |
| Thermocouple Type | Type C |
Typical Applications
Ideal for sintering and annealing air-sensitive ceramics, powders, and wafers requiring controlled inert atmospheres or vacuum conditions. Suitable for research and development in materials science, semiconductor processing, and advanced ceramics manufacturing.
Configuration & Operating Notes
The furnace requires a recirculating water chiller for magnetron and chamber cooling (sold separately). An optional mechanical vacuum pump can achieve vacuum levels down to 10⁻² torr after thorough baking. Due to plasma risks, operation above 500ºC must be performed under inert gas backfill near ambient pressure to protect chamber seals and ensure longevity. A disk-type heater for wafer annealing up to 1000ºC is available as an optional accessory.
