HVF1600X12L Cold-Wall High Vacuum Furnace with 1600°C Max Temperature and 200×200×300 mm Heating Area
The HVF1600X12L furnace is engineered for precise high-temperature processing under high vacuum conditions, suitable for applications requiring contamination-free thermal treatment. Its cold-wall design features a water-cooled stainless steel vacuum chamber housing all metallic components, ensuring a clean environment and minimizing outgassing during operation.
This front-loading furnace utilizes resistance heating via tungsten or molybdenum bands, capable of reaching temperatures up to 1600°C. The effective heating volume is 200 mm wide, 200 mm high, and 300 mm deep, accommodating various sample sizes under vacuum or inert gas atmospheres. The system can be adapted for hydrogen gas environments upon request.
Key Features
- Cold-wall vacuum chamber made of water-cooled 304 stainless steel for durability and cleanliness.
- Heating elements: tungsten bands for operation up to 1600°C under high vacuum or argon; molybdenum bands for up to 1400°C.
- Effective heating zone of 200×200×300 mm (12 liters) suitable for diverse sample sizes.
- Vacuum capability reaching below 1×10-5 torr at room temperature.
- Advanced temperature control via Eurotherm 3000 programmable controller with ±1°C accuracy and over-temperature protection.
- Touch screen interface for easy programming and temperature profile recording.
- Optional accessories include a water chiller for cooling and a turbo pump for enhanced vacuum performance.
Technical Specifications
| Parameter | Specification |
|---|---|
| Power Supply | 480 VAC, 60 Hz, 3-phase or 380 VAC, 50 Hz, 3-phase |
| Maximum Power | 60 kW |
| Vacuum Chamber Material | 304 Stainless Steel, water-cooled |
| Vacuum Port | ISO100-K |
| Vacuum Level | <1×10-5 torr at room temperature |
| Gas Inlet/Outlet | 1/4 inch with valves, two float flowmeters |
| Heating Elements | Tungsten bands (for high vacuum <1×10-4 torr or Ar ambient), Molybdenum bands |
| Effective Heating Zone | 200 mm (W) × 200 mm (H) × 300 mm (D) (12 liters) |
| Maximum Temperature | 1600°C (Tungsten elements), 1400°C (Molybdenum elements) |
| Thermocouple Type | Type B (Tungsten), Type S (Molybdenum) |
| Temperature Controller | Eurotherm 3000 programmable with over-temperature protection |
| Temperature Control Accuracy | ±1°C |
| Max Heating Rate | 20°C per minute |
| Temperature Uniformity | ±8°C |
| Communication Interface | RS 485 port for PC remote control |
Typical Applications
This furnace is ideal for materials research, semiconductor processing, thin film annealing, and other high-temperature vacuum treatments requiring a contamination-free environment. It supports inert gas atmospheres and can be customized for hydrogen processing, making it versatile for advanced material synthesis and testing.
Configuration & Operating Notes
The HVF1600X12L includes a 10-foot power cable without a plug. A compatible water chiller (e.g., KJ6300) is required but not included to maintain chamber cooling. Vacuum generation requires an external pump; a 260 L/s turbo pump with ISO100/CF100 port is available as an optional accessory. The tungsten heating bands must only be used under high vacuum conditions below 1×10-4 torr or in an argon atmosphere to prevent damage. The system features a user-friendly touch screen for temperature programming and monitoring, with safety features including over-temperature protection.
