VTC-100ML Automated Multi-layer Spin Coater with Heating Cover and Solution Dispenser for Up to 1000 Layers on 4″ Wafers
The VTC-100ML is engineered to facilitate the fabrication of multi-layer thin films, particularly suited for perovskite materials, semiconductors, and optical crystals. It addresses the challenge of producing uniform, high-quality coatings by automating the entire process of solution dispensing, spin coating, and drying. This system supports layer-by-layer deposition of two distinct solutions, enabling up to 1000 coating cycles on wafers up to 4 inches in diameter.
This spin coater integrates vacuum chucks of multiple sizes (1″, 2″, and 4″) to securely hold various sample dimensions during processing. The inclusion of a PTFE heating cover allows rapid thermal drying of wet films, with temperature control up to 200ºC, provided the PTFE chuck is used. The equipment is designed for controlled environments with altitude up to 1000 meters, temperature range of 10 to 40ºC, and relative humidity around 55% ±10%.
주요 기능
- Automated cycle including dispensing, spin coating, and drying for efficient multi-layer film fabrication.
- Two programmable sections (A and B), each with six segments, allowing up to 500 repetitions per section for a total of 1000 layers.
- Spin speed adjustable from 500 to 10,000 RPM with 1 RPM increments for precise control.
- Vacuum chucks available in 1″, 2″, and 4″ sizes to accommodate different wafer dimensions.
- PTFE heating cover providing uniform heating up to 200ºC for rapid film drying.
- Integrated oil-less vacuum pump (120 L/min) included for vacuum chuck operation; compatible with AC110V or 220V power supply.
- Dual stainless steel mini nozzles for solution dispensing with an elevation lever to prevent nozzle drying.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Maximum Layers | 1000 layers (two solutions, 500 cycles each) |
| Spin Speed Range | 500 to 10,000 RPM (1 RPM increments) |
| Z-axis Stroke | 250 mm |
| Vacuum Chuck Sizes | 1″, 2″, 4″ |
| Heating Cover Material | PTFE |
| Heating Temperature Range | Up to 200ºC (with PTFE chuck) |
| Pressure Range | -100 to 100 kPa |
| Power Consumption | Total 1200 W; Heating 800 W |
| Input Voltage | AC 110-220 V, 50/60 Hz (spin coater and pump); AC 110 V, 50/60 Hz (temperature controller) |
| 진공 펌프 | Oil-less, 120 L/min included; compatible with AC110V or 220V |
| Dispensing Nozzles | Two mini stainless steel nozzles with elevation lever |
| Environmental Requirements | Altitude ≤1000 m; Temperature 25±15ºC; Humidity 55%±10% RH |
대표적인 적용 분야
This spin coater is ideal for research and development involving perovskite solar cells, semiconductor thin films, and optical coatings requiring precise multi-layer deposition. It supports complex layer structures by enabling repeated cycles of different solution coatings with controlled drying, suitable for advanced material studies and device fabrication.
구성 및 작동 안내
The system includes an integrated oil-less vacuum pump and dual stainless steel dispensing nozzles. For use inside an argon glove box, a feedthrough for the vacuum pump connection is available at additional cost. The heating cover requires use of the PTFE vacuum chuck to ensure safe operation at elevated temperatures. The two programmable sections allow flexible process customization, with each section capable of six segments and up to 500 repetitions.
