OTF-1200X-S-50-DFSL Dual Sliding Tube Furnace for Thermal CVD with 50 mm Quartz Tube and 1200°C Max Temperature
The OTF-1200X-S-50-DFSL is engineered to facilitate thermal chemical vapor deposition (CVD) by providing precise and flexible heating of source materials within a controlled environment. This system incorporates two independent tube furnaces mounted on sliding rails, allowing users to position each furnace along a quartz processing tube to optimize thermal evaporation, sublimation, and film deposition processes. The sliding mechanism enables rapid heating and cooling by moving the furnace zones relative to the sample location.
Each furnace features a double-layer steel construction capable of reaching a maximum temperature of 1200°C within one hour and maintaining continuous operation at 1100°C. The quartz tube used has an outer diameter of 50 mm, inner diameter of 44 mm, and length of 1500 mm, sealed with hermetic stainless steel vacuum flanges. This setup supports vacuum and low-pressure environments below 0.2 bar, suitable for high-purity CVD applications.
주요 기능
- Dual furnaces slide independently on rails with a maximum sliding distance of 400 mm for precise sample positioning.
- Each furnace includes a 200 mm heating zone and a 60 mm constant temperature zone with ±3°C stability at 800°C.
- Heating elements are Fe-Cr-Al alloy doped with molybdenum for reliable high-temperature performance.
- PID automatic temperature control with 30 programmable segments and built-in over-temperature protection.
- Supports AC 208-240V or 110-120V single-phase power with 1.2 kW per furnace (2.4 kW total).
- Hermetic stainless steel vacuum flanges installed; optional KF25 vacuum ports and digital vacuum gauges available.
- Optional upgrades include motorized sliding, multi-channel gas mixing and delivery, and RF plasma generator for plasma-enhanced CVD.
기술 사양
| 매개변수 | 사양 |
|---|---|
| 최고 기온 | 1200°C (within 1 hour) |
| Continuous Operating Temperature | 1100°C |
| Heating Zone Length | 200 mm per furnace |
| Constant Temperature Zone Length | 60 mm (±3°C at 800°C) |
| Heating Elements | Fe-Cr-Al alloy doped with Mo |
| Processing Tube | Quartz tube, 50 mm OD × 44 mm ID × 1500 mm length |
| Power Supply | AC 208-240V or 110-120V, single phase, 50/60 Hz |
| Power Consumption | 1.2 kW per furnace, 2.4 kW total |
| 온도 제어 | PID with 30 programmable segments, over-temperature alarm, two K-type thermocouples included |
| Sliding Mechanism | Manual sliding on double rails, max 400 mm travel; optional motorized sliding available |
| Vacuum Flanges | Stainless steel vacuum flanges with vacuum gauge; optional KF25 port and digital gauge |
| Vacuum Capability | Down to 10⁻⁵ torr with molecular pump (pump not included) |
대표적인 적용 분야
This dual sliding tube furnace is ideal for thermal CVD processes requiring precise temperature gradients and flexible sample positioning. It supports thermal evaporation, sublimation, and thin film deposition under vacuum or low-pressure conditions. The system is suitable for research and development in materials science, semiconductor fabrication, and surface coating technologies.
구성 및 작동 안내
The furnace includes two power cords and hermetic flanges installed for immediate use. Optional accessories such as motorized sliding rails, multi-channel mass flow controllers for gas delivery, and RF plasma generators can be integrated to enhance system capabilities. Users should install a two-stage pressure regulator on gas cylinders to maintain safe operating pressures below 3 PSI. Cooling rates can be accelerated by sliding the furnace away from the sample, but appropriate heat-resistant protective gear is recommended to avoid burns. The quartz tube is designed for vacuum and low-pressure use below 0.2 bar and should be handled carefully to prevent thermal shock, with gas flow rates limited to under 200 SCCM.
