OTF-1200X-II-80HG-UL Two-Zone Tube Furnace with 1200°C Max, 80 mm OD Quartz Tube, Liquid Evaporator, Humidity and Hydrogen Detectors, and Safety Shutoff Valve
The OTF-1200X-II-80HG-UL is engineered to meet the demanding requirements of hot corrosion studies and chemical vapor deposition (CVD) processes involving hydrogen gas under precisely controlled humidity conditions. This tube furnace incorporates two independently controlled heating zones, each 200 mm in length, allowing a total heated length of 400 mm with a stable constant temperature zone of 150 mm. The system accommodates an 80 mm outer diameter high-purity quartz tube, suitable for high-temperature processing up to 1200°C.
A key feature is the integrated liquid evaporator designed for vaporizing liquid precursors, facilitating the delivery of mixed hydrogen and vaporized chemicals into the reaction chamber. The evaporator includes a stainless steel container with a 600 ml capacity, heated up to 250°C with programmable temperature control. The furnace also incorporates a precision digital humidity monitor capable of measuring relative humidity from 0 to 100% with ±1.5% full scale accuracy, enabling fine adjustment of moisture content in the gas flow.
주요 기능
- Two heating zones with PID-controlled temperature accuracy of ±1°C and 30 programmable segments for heating and cooling profiles.
- High-purity alumina fiber insulation and double shell casing with cooling fans for energy efficiency and safety.
- Integrated liquid evaporator with temperature-controlled stainless steel container for vapor delivery.
- Digital humidity monitor with KF25 flange adaptor for real-time moisture measurement and control.
- Honeywell hydrogen gas detector with automatic shutoff valve to prevent hazardous leaks.
- Two float flow meters (50-500 ml/min) for precise gas flow control of hydrogen and CVD gases.
- Vacuum-compatible quartz tube with SS304 flanges enabling vacuum levels down to 10^-5 torr using a turbopump.
기술 사양
| 매개변수 | 사양 |
|---|---|
| 최고 기온 | 1200°C |
| Heating Zones | Two zones, each 200 mm length (total 400 mm) |
| Constant Temperature Zone | 150 mm within ±1°C when zones set equally |
| Heating Elements | FeCr27Al7MO2 alloy |
| Input Power | 4 kW max, AC 208-240V single phase (30A breaker required) |
| Temperature Controllers | Two digital controllers with 30 programmable segments, PID auto-tune, overheat and thermocouple break protection |
| Quartz Tube Dimensions | 80 mm OD × 74 mm ID × 1000 mm length |
| Vacuum Flanges | SS304 flanges, vacuum to 10^-5 torr with turbopump |
| Gas Flow Meters | Two float flow meters, 50-500 ml/min each |
| Liquid Evaporator Capacity | 600 ml stainless steel container, heated to 250°C |
| Humidity Monitor Range | 0-100% RH with ±1.5% FS accuracy; -60º to +60º DP with ±0.3º accuracy |
| Hydrogen Detector | Honeywell sensor, alarm at 20% LEL, automatic shutoff valve |
| Recommended Heating Rate | 10°C/min |
대표적인 적용 분야
This furnace is ideal for advanced research involving hot corrosion mechanisms, chemical vapor deposition with controlled hydrogen and moisture atmospheres, and other high-temperature processes requiring precise gas mixing and safety monitoring.
구성 및 작동 안내
The system includes a hydrogen gas leak detector and solenoid shutoff valve for enhanced safety. The furnace must be operated under a suitable fume hood (not included). Optional upgrades include anti-corrosive capacitance diaphragm vacuum gauges, multi-channel gas mixers with mass flow controllers, and dry pumps recommended for low-pressure CVD processes involving flammable gases.
