MSKPSEGEC1515 Thermal Evaporation Coater Integrated with Dual-Station Glovebox for Perovskite Solar Cell Fabrication
The MSKPSEGEC1515 system is engineered to support advanced thin film deposition processes specifically tailored for perovskite solar cell development. It integrates a thermal evaporation coater within a dual-station glovebox environment, enabling precise control over deposition conditions while maintaining an ultra-low oxygen and humidity atmosphere essential for sensitive materials.
This coater features a heating chamber capable of reaching temperatures up to 1500°C, constructed from 304 stainless steel and designed for easy disassembly. The system includes six evaporation sources: three metallic boat-type thermal sources and three organic cluster beam sources, allowing simultaneous co-deposition of materials such as Cu, Ag, C60, NPB, and TPBi. The glovebox integration ensures oxygen and humidity levels remain below 1 ppm, critical for fabricating high-quality perovskite films.
주요 기능
- Heating chamber with turbomolecular and mechanical pumps achieves vacuum levels down to 1.0E-5 Torr.
- Sample holder supports substrates up to 150mm x 150mm with rotation (0-30 RPM), adjustable height, and water cooling.
- Three metallic evaporation sources reach temperatures up to 1500°C with constant current/voltage control.
- Three organic cluster beam sources operate within 0-700°C temperature range with adjustable angles up to 15°.
- Integrated PLC touchscreen controls pressure, temperature, film thickness monitoring, and glovebox purification system.
- Glovebox maintains oxygen and humidity below 1 ppm with purification system and includes large and small antechambers.
- Safety interlocks for water flow detection, overcurrent/overvoltage, and electrode open-circuit protection.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Heating Chamber Material | 304 스테인리스강 |
| Heating Chamber Dimensions (L×W×H) | 400mm × 400mm × 450mm |
| Observation Window | 4-inch with anti-fouling baffle |
| Vacuum Level | Down to 1.0E-5 Torr (with turbomolecular pump) |
| Sample Holder Capacity | Up to 150mm × 150mm substrate |
| Sample Rotation | 0-30 RPM |
| Sample Holder Height Adjustment | Up to 50mm |
| Metallic Evaporation Sources | 3 boat-type, max 1500°C, constant current/voltage modes |
| Organic Cluster Beam Sources | 3 sources, 0-700°C, adjustable angle up to 15° |
| Glovebox Purity | Oxygen and humidity less than 1 ppm |
| Power Supply (Evaporation Coater) | AC 380V ±10%, 3-phase, 50Hz, 8 kW |
| Power Supply (Glovebox) | AC 220V ±10%, single phase, 50Hz, 1 kW |
| Gas Inlet (Optional) | 8mm O.D tube fitting, 0.55-0.6 MPa required |
| Water Cooling Flow (Optional) | 15-20 L/min at 15-25°C |
대표적인 적용 분야
This system is ideal for fabricating high-precision thin films in perovskite solar cell research, enabling co-deposition of multiple materials with uniform film thickness. It is also suitable for advanced organic and metallic thin film deposition requiring stringent environmental control.
구성 및 작동 안내
The system includes integrated PLC touchscreen controls for process monitoring and adjustment. Optional gas inlet and water chiller accessories are required for certain operations but are sold separately. Safety interlocks protect against water flow failure, electrical faults, and electrode open circuits. Proper installation of a two-stage pressure regulator is necessary when using gas cylinders to ensure safe operation.
