HVF1600X12L Cold-Wall High Vacuum Furnace with 1600°C Max Temperature and 200×200×300 mm Heating Area
The HVF1600X12L furnace is engineered for advanced laboratory applications requiring high vacuum thermal treatment with minimal contamination. Its cold-wall design features a water-cooled stainless steel vacuum chamber lined exclusively with metallic components to maintain a clean environment and prevent outgassing or contamination during processing. This furnace is ideal for materials research, thin film deposition, and sintering processes that demand precise atmosphere and temperature control.
The heating chamber utilizes resistance heating bands made from tungsten or molybdenum, capable of reaching maximum temperatures of 1600°C and 1400°C respectively. The effective heating volume is 200 mm wide, 200 mm high, and 300 mm deep, suitable for medium-sized samples or components. The furnace supports operation under high vacuum (<1e-5 torr) or inert gas atmospheres such as argon, with optional modifications available for hydrogen gas environments.
주요 기능
- Cold-wall vacuum chamber constructed from water-cooled 304 stainless steel for durability and contamination control.
- Resistance heating bands of tungsten or molybdenum providing stable and uniform heating up to 1600°C.
- Effective heating zone of 200×200×300 mm (12 liters) for versatile sample accommodation.
- High vacuum capability with vacuum levels below 1×10⁻⁵ torr at room temperature.
- Programmable Eurotherm 3000 temperature controller with touch screen interface and ±1°C accuracy.
- Vacuum ports with ISO100-K flange and gas inlet/outlet valves for controlled atmosphere processing.
- Optional water chiller and turbo vacuum pump available to enhance cooling and vacuum performance.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Power Supply | 480 VAC, 60 Hz, 3-phase or 380 VAC, 50 Hz, 3-phase |
| Maximum Power | 60 kW |
| Vacuum Chamber Material | 304 Stainless Steel, water-cooled |
| Vacuum Port | ISO100-K flange |
| Vacuum Level | Less than 1×10⁻⁵ torr at room temperature |
| Gas Inlet/Outlet | 1/4 inch with valves and two float flowmeters |
| Heating Elements | Tungsten or molybdenum resistance bands |
| Effective Heating Area | 200 mm (W) × 200 mm (H) × 300 mm (D), 12 liters |
| 최고 기온 | 1600°C (tungsten), 1400°C (molybdenum) |
| Temperature Sensors | Type B thermocouple (tungsten), Type S thermocouple (molybdenum) |
| 온도 제어 | Eurotherm 3000 programmable controller with touch screen, ±1°C accuracy |
| Max Heating Rate | 20°C per minute |
| 온도 균일도 | ±8°C |
| Communication Interface | RS 485 port for PC remote control |
대표적인 적용 분야
This furnace is suited for high vacuum annealing, sintering, thin film deposition, and materials research requiring controlled atmospheres and high temperatures. It supports inert gas processing and can be adapted for hydrogen atmospheres, making it versatile for semiconductor, ceramic, and metal processing laboratories.
구성 및 작동 안내
The system includes a 10-foot power cable without a plug. Optional accessories include a KJ6300 water chiller or equivalent to maintain cooling water temperature between 5°C and 30°C, and a 260 L/s turbo vacuum pump with ISO100/CF100 port for enhanced vacuum generation. Tungsten heating elements must only be used under high vacuum (<1×10⁻⁴ torr) or argon ambient to prevent oxidation. Proper safety precautions should be observed when operating at high temperatures and vacuum conditions.
