HVF1500X-CW Cold-Wall High-Vacuum Chamber Furnace with 1500°C Max Temperature and Ø100×120 mm Sample Capacity
The HVF1500X-CW furnace is engineered for high-vacuum thermal processing of small samples requiring a contamination-free environment. Its cold-wall design minimizes heat transfer to the vacuum chamber walls, preserving chamber integrity and enabling stable high-temperature operation up to 1500°C. This makes it suitable for applications demanding precise atmosphere control and clean heat treatment conditions.
The vacuum chamber is constructed from electropolished stainless steel 304 with internal dimensions of Ø320×304 mm and features water-cooled components including the load-lock door and electric feedthroughs. The heating unit uses molybdenum coils and a molybdenum sample stage, providing a heating area of Ø150×172 mm and accommodating samples up to Ø100×120 mm with temperature uniformity within ±8°C. Temperature is monitored by a Type K thermocouple and controlled via a Eurotherm EPC 3000 series PID controller with programmable profiles and remote communication capability.
주요 기능
- Cold-wall vacuum chamber with electropolished stainless steel 304 and water cooling for thermal stability
- Maximum operating temperature of 1500°C with molybdenum heating coils and sample stage
- Sample capacity up to Ø100×120 mm with ±8°C temperature uniformity
- PID temperature control with 28-segment programmable profiles and ±1°C accuracy
- Vacuum system ports including DN100CF, DN40KF, and DN16KF with manual gate valve and needle valves for gas handling
- Supports ultimate vacuum below 1×10⁻⁶ torr using a 300 L/s turbomolecular pump (optional)
- Remote communication via RS485 MODBUS RTU for integration with automation systems
기술 사양
| 매개변수 | 사양 |
|---|---|
| Power Supply | 208-240 VAC, 3-phase, 50/60 Hz |
| Power Consumption | 12 kW |
| Vacuum Chamber Material | Electropolished stainless steel 304, water-cooled |
| Vacuum Chamber Internal Size | Ø320×304 mm |
| Heating Area | Ø150×172 mm |
| Maximum Sample Size | Ø100×120 mm |
| 온도 균일도 | ±8°C |
| 최고 기온 | 1500°C |
| Heating Rate | Less than 10°C/min |
| Temperature Sensor | Type K thermocouple |
| Temperature Controller | Eurotherm EPC 3000 series, PID control, 28 programmable segments |
| Vacuum Ports | DN100CF (vacuum generation), DN100CF manual gate valve, DN40KF (ionization gauge), DN16KF (convection gauge) |
| Gas Inlet/Outlet Valves | Two 1/4″ bellow-sealed needle valves (VCR) |
| Ultimate Vacuum | Less than 1×10⁻⁶ torr with 300 L/s turbopump (optional) |
| Maximum Working Pressure | Less than 1.5 bar |
| Communication Interface | RS485, MODBUS RTU |
대표적인 적용 분야
Ideal for high-vacuum heat treatment processes such as annealing, sintering, and material conditioning of small samples in research and development laboratories. Suitable for applications requiring contamination-free environments and precise temperature control up to 1500°C.
구성 및 작동 안내
The furnace includes a water-cooled vacuum chamber with load-lock door and electric feedthroughs. Molybdenum heating coils are consumable and not covered by warranty. Optional accessories include a high-vacuum turbomolecular pump, rotary vane or dry scroll backing pumps, vacuum gauges, and a water chiller for cooling requirements. Proper water flow (minimum 75 L/min) is necessary for safe operation. The system supports remote temperature control and monitoring via RS485 MODBUS RTU. Users should handle vacuum components and consumables according to safety guidelines to maintain performance and longevity.
