GSL2Z-S Compact Two-Channel Gas Delivery System with PLC Touch Panel Control for Vacuum-Sealed Tube Furnaces
The GSL2Z-S is engineered to provide precise and reliable gas mixing and delivery for vacuum-sealed tube furnace processes requiring two distinct gases. It is particularly suited for applications where controlled gas flow and composition are critical, such as chemical vapor deposition or material synthesis under controlled atmospheres.
This compact system integrates two precision mass flow controllers (MFCs) that regulate gas flow rates independently, ensuring accurate mixing ratios. The device operates effectively within a temperature range of 5 to 45 ºC and can handle pressures up to 3×10⁶ Pa, making it suitable for demanding laboratory environments.
주요 기능
- Two built-in precision mass flow controllers with flow ranges of 1–99 SCCM and 1–199 SCCM respectively.
- 6-inch color PLC touchscreen panel for intuitive control and parameter adjustment.
- Integrated stainless steel gas mixing tank (Φ80 x 120 mm) and internal 1/4″ O.D. stainless steel pipeline.
- Mechanical pressure gauge with measurement range from -0.1 to 0.15 MPa and 0.01 MPa per grid resolution.
- 316 stainless steel needle valves and Swagelok tube fittings for robust and leak-free connections.
- Power supply compatible with AC 110–240 V single-phase, 50/60 Hz, consuming 100 W total power.
- Optional oxygen sensor available for monitoring oxygen levels to prevent oxidation during CVD processes.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Mass Flow Controllers | Two precision MFCs |
| Flow Range Controller 1 | 1–99 SCCM |
| Flow Range Controller 2 | 1–199 SCCM |
| Accuracy | ±1.5% Full Scale (FS) |
| Linearity | ±0.5–1.5% FS |
| Repeatability | ±0.2% FS |
| 작동 온도 | 5–45 ºC |
| 최대 압력 | 3 x 10⁶ Pa |
| Power Supply | AC 110–240 V, 50/60 Hz, single phase |
| Power Consumption | 100 W total |
| Control Interface | 6″ color PLC touchscreen |
| Gas Mixing Tank | Stainless steel, Φ80 x 120 mm |
| Internal Pipeline | 1/4″ O.D. stainless steel |
| External Pipeline | 1/4″ O.D. PTFE |
| Pressure Gauge | Mechanical, -0.1 to 0.15 MPa, 0.01 MPa/grid |
| Valves and Fittings | 316 stainless steel needle valve, 1/4″ Swagelok tube fitting |
| Certifications | CE certified; NRTL (UL61010) or CSA optional |
대표적인 적용 분야
This gas delivery system is ideal for laboratory and research environments requiring precise gas flow control in vacuum-sealed tube furnaces. Common uses include chemical vapor deposition (CVD), thin film deposition, and controlled atmosphere processing where two gas types must be accurately mixed and delivered.
구성 및 작동 안내
The GSL2Z-S includes two precision MFCs, a stainless steel gas mixing tank, mechanical pressure gauge, and a 6-inch PLC touchscreen control panel. Optional accessories include an oxygen sensor for monitoring oxygen content in gas mixtures to reduce oxidation risks. Custom MFC ranges can be provided at additional cost upon request. Users should ensure proper installation of stainless steel and PTFE pipelines and follow safety guidelines for handling pressurized gases.
