OTF1200XSFB Fluidized Bed CVD Furnace with 1″ O.D Quartz Tube and Flange for Powder Chemical Vapor Deposition
The OTF1200XSFB furnace is engineered for chemical vapor deposition (CVD) processes involving powder materials suspended in a fluidized bed. This system addresses the challenge of achieving uniform coating and heat transfer on individual particles by suspending them in an upward gas flow within a vertical quartz tube. The fluidized bed ensures thorough interaction between gaseous precursors and solid particles, enhancing coating uniformity and process efficiency.
Central to the design is a 1″ outer diameter quartz tube featuring an enlarged 2″ O.D section in the middle to optimize aerodynamic conditions for particle suspension. A porous quartz frit filter (15–40 microns pore size) is integrated in the lower middle section of the heating zone to evenly distribute gas flow and maintain particles in suspension. The furnace casing is constructed with a double-layer steel structure and high-purity alumina fibrous insulation to maximize energy efficiency and maintain stable thermal conditions.
주요 기능
- Vertical fluidized bed design with uniform gas distribution for consistent particle suspension and coating.
- Porous quartz frit filter (15–40 microns) ensures controlled gas flow and particle retention within the heating zone.
- Quartz tube with enlarged central area (50 mm O.D. x 44 mm I.D.) enhances aerodynamic performance for fluidization.
- Maximum operating temperature of 1100°C with continuous operation up to 1000°C.
- Precise temperature control via programmable controller with PID auto-tune and over-temperature protection.
- Double-layer steel casing with air cooling and alumina insulation for energy efficiency.
- Optional stainless steel tube available for high-pressure applications up to 3 bars and 800°C.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Heating Zone Length | 200 mm (single zone) |
| Constant Heating Zone Accuracy | ±2°C over 60 mm |
| 최고 기온 | 1100°C |
| Continuous Operating Temperature | 1000°C |
| Maximum Heating Rate | ≤ 20°C/min |
| Power Supply | 1200 W, AC 110V or 220V, Single Phase, 50/60 Hz |
| Tube Material and Size | Quartz tube with bottom frit; ends 25 mm O.D. x 22 mm I.D., central enlarged area 50 mm O.D. x 44 mm I.D. |
| Quartz Frit | Porous quartz frit, 15–40 microns pore size, 22 mm O.D. x 4 mm thick |
| Heating Elements | Fe-Cr-Al alloy doped with Mo |
| Temperature Controller | Programmable with 30 segments, PID auto-tune, over-temperature protection, ±1°C accuracy; Eurotherm 3000 optional for ±0.1°C |
| Flanges | 1″ bottom flange with 1/4″ tube fitting for primary gas; 1″ top flange with secondary gas inlet and exhaust |
대표적인 적용 분야
Ideal for powder chemical vapor deposition processes requiring uniform coating on particulate materials, such as catalyst preparation, battery material synthesis, and advanced ceramic coatings. The fluidized bed design promotes homogeneous gas-solid interactions and efficient heat transfer.
구성 및 작동 안내
The furnace includes a quartz tube with integrated porous frit and flanges for gas introduction and exhaust. Optional accessories include a stainless steel tube for high-pressure applications, gas mixing systems for CVD or ALD processes, oxygen sensors for gas monitoring, ultrasonic atomizers for sub-micron droplet delivery, and continuous material feeders. Gas flow velocity must be carefully adjusted to maintain particle suspension without loss from the chamber. The split door design facilitates tube installation and maintenance. Safety features include over-temperature alarms and thermocouple failure protection.
