VBF-1200X-6A Automatic Bottom Loading Vertical Quartz Tube Furnace with 1200°C Max Temperature and Controlled Atmosphere
The VBF-1200X-6A furnace is engineered for laboratory applications requiring precise thermal treatment of materials within a controlled atmosphere. Its vertical design incorporates a 6-inch outer diameter quartz tube, enabling uniform heating and easy sample handling via an automatic bottom loading stage. This setup is ideal for processes such as material synthesis, annealing, and chemical vapor deposition where atmosphere control and temperature uniformity are critical.
Equipped with a programmable touch-screen panel, the furnace allows users to set heating and cooling rates, temperature dwell times, and gas pressures with high accuracy. The system supports integration with PC software and robotic arms for autonomous operation, facilitating continuous 24/7 processing in multi-furnace configurations.
주요 기능
- Maximum working temperature of 1200°C (short term) and stable long-term operation at 1100°C.
- Two heating zones totaling 350 mm length with ±2°C uniformity over 120 mm.
- Fused quartz processing tube (150 mm OD × 144 mm ID × 600 mm length) for high purity and thermal stability.
- Water-cooled stainless steel sealing flanges with digital vacuum gauge, mechanical pressure gauge, and gas inlet ports.
- Sample stage diameter of 130 mm made from quartz plate, supporting large or multiple crucibles.
- Touch-screen control with two 50-segment temperature controllers and ±1°C accuracy; optional Eurotherm controller upgrade to ±0.1°C.
- Includes a 16 L/min recirculating water chiller to protect sealing components and maintain system integrity.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Power Supply | 220 VAC ±10%, 50/60 Hz, single-phase |
| Rated Power | 6 kW max. |
| 최고 기온 | 1200°C (≤ 30 minutes) |
| Long-Term Temperature | 1100°C |
| Heating Elements | FeCrAlMo wire |
| Heating Zones | Two zones, 175 mm + 175 mm (total 350 mm) |
| 온도 균일도 | ±2°C over 120 mm zone |
| Heating Rate | Suggested 10°C/min |
| 온도 제어 | Touch screen with two 50-segment controllers, ±1°C accuracy; optional ±0.1°C Eurotherm upgrade |
| Thermocouples | Two K-type |
| Processing Tube Dimensions | Quartz tube 150 mm OD × 144 mm ID × 600 mm length |
| Sample Stage | Quartz plate, 130 mm diameter |
| Sealing Flanges | Water-cooled SS304 with vacuum and pressure gauges, G1/4 gas inlet, KF25 vacuum port |
| Mass Flow Controller | 1 unit, 1–1000 sccm |
| Water Chiller | 16 L/min recirculating |
| Vacuum System (Optional) | Mechanical pump (10⁻² Torr), Molecular pump (10⁻⁵ Torr) |
대표적인 적용 분야
This furnace is suited for advanced material research including thin film deposition, crystal growth, annealing, and chemical vapor deposition processes requiring precise temperature control and atmosphere regulation. Its automatic bottom loading facilitates handling of multiple samples or large crucibles, enhancing throughput in research and development labs.
구성 및 작동 안내
The furnace can be integrated with a PC and robotic arm for fully automated operation, enabling continuous processing. Optional upgrades include a hydrogen gas delivery system with automatic burner and leak detection for specialized atmosphere control. Proper use of the included water chiller is essential to maintain sealing flange integrity and protect silicone O-rings during operation.
