GSL1200XS6ASD Automated 6-Inch Quartz Tube Furnace for AI-Driven Material Research up to 1100°C
The GSL1200XS6ASD is engineered to facilitate advanced materials research by automating complex thermal processing sequences within a 6-inch outer diameter quartz tube. It is particularly suited for AI-assisted workflows requiring precise control over atmosphere, temperature, and sample handling to accelerate novel material discovery.
This tube furnace integrates automated pump-purge cycles, steady gas flow regulation, vacuum control, and programmable heating and cooling stages. Sample loading and retrieval are streamlined via a motorized sliding flange and can be assisted by an optional robotic arm, enabling continuous 24/7 operation. Remote PC control and data logging capabilities support up to eight linked furnaces for scalable research setups.
주요 기능
- Maximum operating temperature below 1100°C with dual 175 mm heating zones for uniform thermal processing.
- Quartz tube (Ø150×700 mm) with multi-stack quartz thermal block and high-purity alumina fibrous insulation for energy efficiency.
- PID programmable temperature controller supporting up to 50 segments with ±1°C accuracy and heating rates up to 10°C/min.
- Automated pump-purge, vacuum generation via integrated rotary vane pump, and mass flow control (1-1000 sccm) for precise atmosphere management.
- Motorized sliding sample stage with 8 cavities and multiple crucible material options (quartz, alumina, graphite, magnesia) plus wafer holders for 1-4″ wafers.
- 304 stainless steel water-cooled flanges with ports for chilled water, gas inlet/outlet, vacuum, and in-situ temperature measurement.
- LabVIEW-based software with Ethernet TCP/IP communication, remote PC control, monitoring, data logging, and complimentary Python API.
기술 사양
| 매개변수 | 사양 |
|---|---|
| 최고 기온 | <1100°C |
| Heating Zones | Dual zones, 175 mm + 175 mm |
| 온도 균일도 | ±5°C over 120 mm |
| Heating Element | FeCrAl: Mo |
| Thermocouple | Type K |
| Heating Rate | ≤10°C/min |
| Tube Dimensions | Quartz tube Ø150×700 mm |
| Sample Stage | Quartz stage with 8 cavities; crucibles Ø21×25 mm (6 mL) |
| Gas Flow Control | Mass flow controller 1-1000 sccm |
| Vacuum Gauge | Inficon PCG 554 Pirani gauge, 3.8e-5 to 1125 torr |
| Power Supply | 208-240 VAC, 50/60 Hz, 6 kW |
| Cooling | Recirculating chilled water, 10 L/min, 5-25°C (not included) |
| Control Software | LabVIEW-based with remote PC control, data logging, Python API, Ethernet TCP/IP |
대표적인 적용 분야
Ideal for automated high-temperature synthesis and processing of advanced materials, including AI-driven experimentation workflows. Compatible with integration of dosing, mixing, milling, and pellet pressing equipment for comprehensive materials development platforms.
구성 및 작동 안내
The furnace includes a rotary vane vacuum pump controlled via the system. Sample handling automation is optional via an integrated robotic arm with 5 kg load capacity and ±0.02 mm positioning accuracy. Chilled water supply is required but the recommended recirculating chiller is sold separately. Various crucible materials and wafer holders are available on request to accommodate diverse sample types. Compliance certifications such as NRTL or CSA can be provided upon request at additional cost.
