VTC-200P Anti-Corrosion Spin Coater with Polypropylene Construction, 6″ Wafer Capacity, and Argon Gas Compatibility
The VTC-200P spin coater is engineered to address the challenges of coating substrates with aggressive acidic or alkaline solutions, particularly within controlled inert atmospheres such as argon-filled gloveboxes. Its construction from polypropylene (PP) ensures resistance to corrosion, making it suitable for handling active chemical coatings that would otherwise degrade standard materials.
This model supports wafers up to 6 inches in diameter using a 4-inch diameter vacuum chuck included in the standard package, with an option for a 6-inch chuck upon request. The spin coater’s digital control box is physically separated from the spinning unit, allowing remote operation and integration within glovebox environments. The system includes an oil-free vacuum pump and a 20 mL syringe for precise application of coating materials.
Wichtigste Merkmale
- Polypropylene case and spin disk resist corrosive acidic and alkaline solutions.
- Variable spin speed adjustable from 500 to 8000 rpm with six programmable segments per recipe.
- Supports up to 12 saved programs with six segments each, enabling complex coating protocols.
- 4″ vacuum chuck included, compatible with wafers from 4″ to 6″ diameter; smaller chucks available optionally.
- Oil-less vacuum pump included for substrate holding; compatible with glovebox inert gas environments.
- Digital control box separated from spin coater for remote operation and glovebox integration.
- 20 mL syringe supplied for controlled liquid dispensing during coating.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Material | Polypropylene (PP) for case and spin disk |
| Maximum Wafer Diameter | 6 inches (using 4″ vacuum chuck included; 6″ chuck optional) |
| Vacuum Chuck Diameter | 100 mm (4″) |
| Spin Speed Range | 500 to 8000 rpm (programmable in six segments) |
| Motor | 24 VDC brushless, 200 W max |
| Stromversorgung | 220 VAC, 50/60 Hz, single phase, 1000 W max (110 V optional with transformer) |
| Vakuumpumpe | Oil-less pump included (120 L/min capacity) |
| Control Features | Digital control box with six programmable speed/time segments; up to 12 programs stored |
| Atmosphere Compatibility | Designed for use under argon or inert gas atmosphere inside gloveboxes |
Typische Anwendungsbereiche
The VTC-200P is suited for spin coating processes involving corrosive chemical solutions such as acidic or alkaline coatings on semiconductor wafers, thin films, and other substrates. Its compatibility with inert gas glovebox environments makes it ideal for sensitive materials requiring oxygen- and moisture-free conditions during coating.
Hinweise zur Konfiguration und zum Betrieb
The standard package includes the spin coater unit, digital control box, 4″ vacuum chuck, oil-less vacuum pump, 20 mL syringe, vacuum hose, filter to protect the pump from wastewater, and blue adhesive tape for sample mounting. Optional accessories include smaller vacuum chucks for substrates under 4″, precision electronic pipettes for improved liquid dispensing, plasma cleaners for substrate surface treatment, heatable syringes, and heating covers with digital temperature control for in situ drying.
When integrating the unit into a glovebox, a KF40 feedthrough is required to connect power cables externally. The motor is brushless DC type designed to operate reliably under inert gas atmospheres. Users should avoid over-flushing the water bowl to prevent liquid ingress into the motor shaft and follow recommended cleaning procedures to maintain performance and longevity.
