VBF-1600X-B Vertical Atmosphere Controlled Furnace with 11″ I.D. x 13″ Chamber, Automatic Bottom Loading, and 1600°C Max Temperature
The VBF-1600X-B furnace is engineered to support precise sintering and annealing processes for semiconductor wafers and advanced materials requiring controlled atmospheres. Its vertical design with an 11-inch internal diameter and 13-inch length sealed chamber accommodates samples up to 50 kg, facilitating efficient bottom loading via an automated motorized mechanism. This setup enhances operational safety and ease of sample handling in vacuum or inert gas environments.
Operating temperatures range continuously from 800°C to 1600°C, with short-term capability up to 1700°C for less than one hour. The furnace achieves vacuum levels down to 10⁻² torr using an integrated mechanical pump and features water-cooled stainless steel vacuum flanges to maintain seal integrity. Temperature uniformity is tightly controlled within ±0.5°C, supported by a programmable Eurotherm controller with PID and auto-tune functions, ensuring precise thermal profiles for complex thermal cycles.
Wichtigste Merkmale
- Double-layer steel casing with water-cooled vacuum-sealed chamber for durability and thermal efficiency
- High-purity fibrous alumina insulation minimizes energy consumption
- Automatic bottom loading system supports up to 50 kg sample weight for safe and convenient operation
- Programmable temperature control up to 1600°C with ±0.1°C accuracy and B-type thermocouple
- Vacuum capability to 10⁻² torr via included mechanical pump
- Integrated pressure control with safety release valve and dual gas flowmeters for atmosphere regulation
- Touchscreen interface with RS485 PC connectivity for advanced process control and monitoring
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Kammergröße | 280 mm diameter x 300 mm height (13 liters) |
| Höchsttemperatur | 1600°C continuous, 1700°C for <1 hour |
| Temperaturgleichmäßigkeit | ±0.5°C |
| Heizelemente | Molybdenum disilicide (MoSi2) |
| Stromversorgung | Single-phase 220 VAC, 50/60 Hz, 13 kW max |
| Vakuumniveau | 10⁻² torr via mechanical pump |
| Isolierung | High-purity fibrous alumina |
| Steuerungssystem | Eurotherm programmable controller with PID, auto-tune, and touchscreen interface |
| Sample Load Capacity | Up to 50 kg via automatic bottom loading |
| Kühlung | Water-cooled stainless steel vacuum flanges and recirculating water chiller included |
Typische Anwendungsbereiche
Ideal for sintering ceramics, annealing semiconductor wafers, material research under controlled atmospheres, and processes requiring precise thermal cycling and vacuum conditions.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes a mechanical vacuum pump, recirculating water chiller, and a programmable temperature controller. Optional PC control software is available and requires ordering a compatible laptop for installation and testing prior to shipment. Safety features include automatic pressure control, built-in pressure release valve, and overheating protection. Proper water cooling and vacuum sealing maintenance are essential for reliable operation.
