OTF-1200X-VT-III-50 Three-Zone Vertical Tube Furnace with 2″ Quartz Tube and Vacuum Flanges
The OTF-1200X-VT-III-50 vertical tube furnace is engineered for advanced laboratory thermal processing tasks that require controlled atmosphere and precise temperature management. Its vertical orientation and vacuum-sealed quartz tube enable rapid heating and quenching of samples under vacuum or gas flow environments, making it suitable for physical vapor deposition (PVD), chemical vapor deposition (CVD), and close-spaced sublimation (CSS) coating processes.
This furnace incorporates three independently controlled heating zones, each capable of reaching temperatures up to 1200°C within one hour and maintaining continuous operation at 1100°C. The system includes a 50 mm outer diameter quartz tube, 1200 mm in length, housed within a double-layer steel structure with air cooling to maintain safe external temperatures. Vacuum-tight stainless steel flanges with integrated gauges and valves facilitate controlled atmosphere processing and easy connection to vacuum or gas supply systems.
Wichtigste Merkmale
- Three heating zones with total length of 610 mm (152.4 mm + 304.8 mm + 152.4 mm) and ±1°C temperature accuracy.
- 30-segment programmable temperature controller with PID auto-tuning and over-temperature protection.
- Vacuum sealing with stainless steel flanges, vacuum gauge, valves, and gas inlet/outlet ports with 1/4″ barb connectors.
- Quartz tube (50 mm OD, 44 mm ID, 1200 mm length) included; compatible with tubes from 50 mm to 130 mm diameter.
- Heating elements made of Fe-Cr-Al alloy doped with molybdenum, rated for 1300°C maximum.
- Mobile cart design for easy relocation within the laboratory.
- Optional upgrades include Eurotherm 3000 controller for ±0.1°C accuracy and software for remote monitoring and control.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Modell | OTF-1200X-VT-III-50 |
| Höchsttemperatur | 1200°C (each zone, <1 hr) |
| Continuous Operating Temperature | 1100°C (each zone) |
| Erwärmungsgeschwindigkeit | ≤ 20°C/min |
| Temperaturgenauigkeit | ±1°C (programmable controller) |
| Heating Zone Length | 610 mm total (152.4 + 304.8 + 152.4 mm) |
| Konstanttemperaturzone | 480 mm within ±2°C |
| Quartz Tube Dimensions | 1200 mm length, 50 mm OD, 44 mm ID |
| Stromversorgung | AC 208-240V, Single Phase, 50/60 Hz |
| Stromverbrauch | 4.8 kW (recommended 30A circuit breaker) |
| Vakuumniveau | 10⁻² Torr (mechanical pump), 10⁻⁵ Torr (molecular pump) |
| Leak Rate | < 5 mTorr/min |
| Heating Element Material | Fe-Cr-Al alloy doped with Mo |
| Control Interface | RS485 communication port; optional software and remote control available |
Typische Anwendungsbereiche
This vertical tube furnace is well suited for thin film deposition techniques such as PVD, CVD, and CSS, where precise temperature control and controlled atmosphere are critical. It is also applicable for vacuum brazing of small flat samples and hybrid physical-chemical vapor deposition (HPCVD) processes with custom sample holders.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes foam ceramic blocks with alumina coating to protect vacuum O-rings from heat damage. Stainless steel vacuum flanges come with integrated vacuum gauges and valves, plus gas inlet and outlet ports with 1/4″ barb connectors. Optional flange adapters such as KF25D or Swagelok fittings are available at extra cost.
Safe operation under vacuum or low pressure (<0.2 bar) is recommended, with gas flow rates limited to below 200 SCCM to minimize thermal shock to the quartz tube. A two-stage pressure regulator must be installed on gas cylinders to maintain pressure below 3 PSI. Temperature calibration prior to use is advised for optimal accuracy.
