OTF-1200X-VT-II-100 Two-Zone Split Vertical Tube Furnace with 4″ Quartz Tube, Vacuum Flanges, and 1100°C Max Temperature
The OTF-1200X-VT-II-100 is engineered for precise thermal processing of samples under vacuum or controlled gas atmospheres. Its vertical tube design facilitates rapid heating and quenching cycles, making it suitable for advanced material synthesis and coating applications such as Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), and Close-Spaced Sublimation (CSS). The vacuum-sealed quartz tube ensures a controlled environment for sensitive processes.
This furnace incorporates two independently controlled heating zones, each capable of reaching temperatures up to 1100°C with a continuous operating temperature of 1000°C. The system includes a 100 mm outer diameter, 1000 mm length quartz tube with vacuum flanges equipped with gauges and valves for precise atmosphere control. Mounted on a heavy-duty mobile cart, the unit offers flexibility in laboratory setups.
Wichtigste Merkmale
- Two heating zones (200 mm each) providing a total heated length of 400 mm with ±1°C temperature accuracy.
- Vacuum-sealed 100 mm diameter quartz tube with stainless steel flanges, vacuum gauge, and valves included.
- Programmable temperature controllers with 30-segment heating and cooling profiles and built-in PID auto-tuning.
- Maximum heating rate up to 20°C/min and temperature uniformity of ±5°C over a 300 mm zone at 500°C.
- Foam ceramic blocks with alumina coating protect O-rings from heat radiation damage.
- Vacuum capability down to 10⁻⁵ Torr with leak rate less than 5 mTorr/min.
- Optional upgrades include mullite tubes for operation up to 1250°C and advanced Eurotherm controllers with ±0.1°C accuracy.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Höchsttemperatur | 1100°C (each zone, <1 hr) |
| Continuous Operating Temperature | 1000°C (each zone) |
| Heizzonen | Two zones, 200 mm each (total 400 mm) |
| Temperaturgenauigkeit | ±1 °C |
| Temperaturgleichmäßigkeit | ±5°C over 300 mm at 500°C |
| Erwärmungsgeschwindigkeit | Up to 20°C/min |
| Tube Material and Dimensions | Quartz tube, 100 mm OD, 95 mm ID, 1000 mm length |
| Vacuum Flanges | Stainless steel with vacuum gauge and valves; gas inlet/outlet with 1/4″ barb connectors |
| Vakuumniveau | 10⁻² Torr (mechanical pump), 10⁻⁵ Torr (molecular pump) |
| Stromversorgung | AC 208-240V, Single Phase, 50/60 Hz, 6 kW total (3 kW per zone) |
| Heating Element | Fe-Cr-Al alloy doped with Mo, rated to 1300°C |
| Steuerungssystem | MET certified controllers with 30 programmable segments, PID auto-tune, over-temperature protection, RS485 communication port |
Typische Anwendungsbereiche
Ideal for vacuum or low-pressure heat treatments, thin film deposition processes such as PVD, CVD, and CSS, material brazing under vacuum, and rapid thermal cycling including quenching in controlled atmospheres.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes foam ceramic blocks with alumina coating to protect vacuum O-rings from heat radiation damage. Users may upgrade the quartz tube to mullite for higher temperature operation up to 1250°C. Optional accessories include advanced temperature controllers and various vacuum flange adapters (KF25D, Swagelok fittings) available at extra cost.
Safe operation requires limiting gas flow rates below 200 SCCM and maintaining vacuum pressures under 0.2 bar. A two-stage pressure regulator must be installed on gas cylinders to restrict pressure below 3 PSI. The furnace is mounted on a mobile cart for ease of relocation within the laboratory.
