GSL-1700X-III Three-Zone Alumina Tube Furnace with Vacuum Flanges
The GSL-1700X-III tube furnace is engineered for advanced laboratory applications requiring controlled thermal gradients and high-temperature processing under vacuum. It is particularly suited for preparing functional materials with precise temperature zones and for chemical vapor deposition (CVD) epitaxial film growth. The furnace accommodates a high-purity alumina tube with a 60mm outer diameter, sealed with a stainless steel vacuum flange capable of reaching pressures down to 10-4 torr when paired with a turbo vacuum pump.
This furnace features three independently controlled heating zones, each 12 inches (approximately 300 mm) in length, allowing the creation of various thermal profiles. The central zone is heated by molybdenum disilicide (MoSi2) elements capable of reaching 1700°C, while the two outer zones use silicon carbide (SiC) elements with a maximum temperature of 1400°C (sustained up to 1500°C for short durations). The design includes high purity fibrous alumina insulation and a double-layer steel case with cooling fans to maintain low external surface temperatures.
Wichtigste Merkmale
- Three independent heating zones with 30-segment digital PID temperature controllers for precise thermal gradient control.
- Center zone heated by Super-1800 MoSi2 elements up to 1700°C; side zones heated by SiC elements up to 1400°C.
- High purity 99.8% alumina tube, 60 mm outer diameter, 1200 mm length, with stainless steel vacuum flange and valve included.
- Vacuum capability down to 10-4 torr when used with appropriate vacuum pumps.
- Double-layer steel casing with cooling fans and fibrous alumina insulation for energy efficiency and safety.
- Programmable temperature controllers with microprocessor-based PID control, self-tuning, and protection against thermocouple failure.
- Optional upgrades include European temperature controllers with enhanced accuracy and digital communication interfaces.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Heizzonen | Three zones, total 25″ (630 mm) including refractory separators |
| Zone 1 & 3 Heating Elements | 4 pcs U-type SiC (30×300 mm) each, 400–1400°C (1500°C <1 hr), max 10°C/min heating rate |
| Zone 2 Heating Elements | 6 pcs U-type MoSi2 (30×300 mm), 800–1700°C, max 5°C/min heating rate |
| Temperature Controllers | Three digital PID controllers, 30 programmable segments, ±1°C accuracy |
| Tube Dimensions | Alumina tube, 60 mm OD x 54 mm ID x 1200 mm length, 99.8% purity |
| Vacuum Flange | 60 mm stainless steel flange with valve and meter, porous ceramic blocks for radiation protection |
| Leistung | 10 kW, 75A air breaker required, AC 208-240 V, single phase, 50/60 Hz |
| Max Heating Rate | Up to 10°C/min (zones 1 and 3), 5°C/min (zone 2) |
| Operating Vacuum Pressure | Down to 10-4 torr (with turbo pump), safe vacuum use up to 1500°C |
Typische Anwendungsbereiche
Ideal for research and development of functional materials requiring controlled thermal gradients, epitaxial film growth by chemical vapor deposition (CVD), and other high-temperature vacuum processes.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes two thermal blocks for internal placement to optimize temperature uniformity. Optional flange supports are available to prevent tube rotation. Users should install a two-stage pressure regulator on gas cylinders to limit pressure below 3 PSI for safe operation. Gas flow rates should be limited to under 200 SCCM. The furnace is designed for vacuum and low-pressure operation below 0.02 MPa (0.2 bar). Calibration of temperature before use is recommended for accuracy. Optional accessories include spare alumina tubes, MoSi2 heating elements, mobile carts, and digital vacuum gauges.
