GSL-1100X-24-IV 4-Zone Tube Furnace with 24″ Quartz Tube, Vacuum Flanges, and PID Temperature Control up to 1100°C
The GSL-1100X-24-IV tube furnace is engineered for advanced laboratory applications requiring precise thermal processing of materials under vacuum or controlled gas environments. Its large 24-inch (600 mm) diameter quartz tube accommodates sizable samples or wafers, making it suitable for sintering, annealing, and chemical vapor deposition (CVD) processes. The furnace’s design supports uniform heating over a 1200 mm length divided into four independently controlled zones, enabling tailored temperature profiles along the tube.
This model integrates vacuum-sealed hinged stainless steel flanges with pre-installed needle valves and vacuum gauges, facilitating immediate connection to vacuum pumps and gas delivery systems. The furnace achieves vacuum levels as low as 10-5 torr with appropriate turbopumps, supporting high-purity processing conditions. Temperature control is managed by four digital PID controllers with self-tuning capabilities and K-type thermocouples, delivering ±1°C accuracy and programmable 30-segment profiles for complex thermal cycles.
Wichtigste Merkmale
- Four heating zones each 300 mm long for precise temperature gradients and uniformity.
- High-quality quartz tube (OD 600 mm x ID 590 mm x L 1500 mm) suitable for vacuum and gas atmospheres.
- Double-layer steel casing with air cooling keeps external surface temperature below 70°C.
- Pre-installed vacuum flanges with needle valves, vacuum gauges, and KF40 ports for easy integration.
- Microprocessor-based PID control with 30 programmable segments and ±1°C temperature accuracy.
- Maximum operating temperature up to 1100°C with short-term capability to 1150°C.
- Includes air circulating water chiller for flange cooling and ceramic tube blocks to reduce heat radiation.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Modell | GSL-1100X-24-IV |
| Heizzonen | 4 zones, each 300 mm length (total 1200 mm) |
| Quartz Tube Dimensions | Outer Diameter 600 mm, Inner Diameter 590 mm, Length 1500 mm |
| Maximum Operating Temperature | 1100°C (normal), 1150°C (<1 hour max) |
| Temperaturgleichmäßigkeit | ±3°C cross-section, ±3 to ±5°C longitudinal (depending on zone settings) |
| Temperaturregelung | Four K-type thermocouples, PID self-tuning, 30-segment programmable |
| Control Accuracy | ±1 °C |
| Vakuumfähigkeit | 10-2 torr with mechanical pump, 10-4 torr with turbopump, down to 5×10-6 torr with high-speed turbopump |
| Vacuum Flanges | Hinged stainless steel with silicon O-rings, includes vacuum gauge and needle valves |
| Stromversorgung | Three Phase, 220V AC, 50/60 Hz |
| Stromverbrauch | Approximately 50 kW |
| Kühlung | Air circulating water chiller included (16 L/min flow) |
Typische Anwendungsbereiche
This tube furnace is widely used in materials science and chemical laboratories for sintering new material samples, annealing wafers, and conducting CVD processes under vacuum or controlled atmospheres. It supports research and development in semiconductor fabrication, thin film deposition, and advanced material synthesis requiring precise thermal profiles and high vacuum conditions.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes two fibrous ceramic tube blocks to minimize heat radiation and improve energy efficiency; these must be fully inserted before heating. Calibration of the temperature is recommended before use to ensure accuracy and uniformity. Optional accessories include a temperature calibration kit with a K-type thermocouple and temperature calibrator, turbopumps for achieving higher vacuum levels, and gas delivery systems for CVD applications.
Safety precautions require limiting gas pressure below 3 PSI using a two-stage regulator and restricting gas flow rates to under 200 SCCM to prevent thermal shock to the quartz tube. Vacuum operation is safe up to 1000°C. Integration of gas leak detectors is advised when working with flammable gases such as hydrogen.
