GSL-1100X-24-IV 4-Zone Tube Furnace with 24″ Quartz Tube and Vacuum Flanges
The GSL-1100X-24-IV tube furnace is engineered for advanced laboratory applications requiring precise thermal processing under vacuum or controlled atmospheres. It is particularly suited for sintering, annealing, and chemical vapor deposition (CVD) of novel materials, providing a stable environment for materials research and development.
This furnace incorporates a large 24-inch (600 mm) diameter high-quality quartz tube, supported by hinged stainless steel vacuum flanges with silicon O-ring seals to enable vacuum levels down to 10-5 torr when used with appropriate turbopumps. The design includes pre-installed needle valves and vacuum gauges for immediate vacuum system integration.
Wichtigste Merkmale
- Four independently controlled heating zones, each 300 mm long, totaling 1200 mm of heating length.
- Microprocessor-based PID controllers with self-tuning and 30-segment programmable profiles for precise temperature management.
- Maximum operating temperature of 1100°C with ±1°C control accuracy and uniformity within ±3°C across the cross-section.
- Double-layer steel casing with air cooling keeps external surface temperature below 70°C for safe operation.
- Includes two fibrous ceramic tube blocks to minimize heat radiation loss inside the furnace chamber.
- Vacuum sealing system with hinged stainless steel flanges, silicon O-rings, and integrated ports for vacuum gauge, needle valves, and thermocouple insertion.
- Air circulating water chiller included for flange cooling at 16 L/min flow rate.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Modell | GSL-1100X-24-IV |
| Heizzonen | 4 zones, each 300 mm length (total 1200 mm) |
| Quartz Tube Dimensions | Outer Diameter 600 mm, Inner Diameter 590 mm, Length 1500 mm |
| Maximum Operating Temperature | 1100°C (normal), up to 1150°C for less than 1 hour |
| Temperaturregelung | Four K-type thermocouples, PID self-tuning controllers, ±1°C accuracy |
| Temperaturgleichmäßigkeit | ±3°C cross-section, ±3 to ±5°C longitudinal over 1000-1100 mm |
| Heating Element | NiCrAl resistance wire |
| Vacuum Level Capability | 10-2 torr with mechanical pump, 10-4 torr with turbopump, down to 5×10-6 torr with high-speed turbopump |
| Vacuum Flanges | Hinged stainless steel with silicon O-rings, includes vacuum gauge, needle valves, KF40 port |
| Kühlung | Air circulating water chiller at 16 L/min for flange cooling |
| Stromversorgung | Three phase, 220 V AC, 50/60 Hz, approx. 50 kW power consumption |
| Control Interface | Standard digital PID controllers; optional touch screen panel and PC software |
Typische Anwendungsbereiche
This tube furnace is ideal for materials science laboratories conducting sintering, annealing, and chemical vapor deposition (CVD) processes under vacuum or controlled gas atmospheres. It supports wafer processing up to 8 inches and is suitable for research on new materials requiring precise thermal profiles.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes two fibrous ceramic tube blocks to reduce heat radiation losses; these must be fully inserted before heating. Calibration of temperature is recommended before use to ensure accuracy and uniformity, with optional calibration kits available. Vacuum flanges are designed for vacuum and low-pressure operation below 0.2 bar (3 psi). A two-stage pressure regulator is required on gas cylinders to limit pressure below 3 psi for safety. Gas flow rates should be limited to under 200 SCCM to prevent thermal shock to the quartz tube. Optional accessories include turbopumps for high vacuum, gas delivery systems for CVD, and gas leak detectors for flammable gases.
