MSKPSEGEC1515 Thermal Evaporation Coater Integrated with Dual-Station Glovebox for Perovskite Solar Cell Fabrication
The MSKPSEGEC1515 system is engineered to meet the demanding requirements of fabricating high-quality perovskite solar cells through precise thin film deposition. This thermal evaporation coater is fully integrated within a dual-station glovebox, providing a rigorously controlled environment with oxygen and humidity levels maintained below 1 ppm. Such conditions are critical for handling oxygen- and moisture-sensitive materials commonly used in advanced photovoltaic research.
The system features a heating chamber constructed from 304 stainless steel, measuring 400mm x 400mm x 450mm, and includes a 4-inch observation window with an anti-fouling baffle for process monitoring. The chamber is equipped with a turbomolecular pump and mechanical pump combination, enabling vacuum levels down to 1.0E-5 Torr, essential for high-purity film deposition. The sample holder accommodates substrates up to 150mm by 150mm, supports rotation speeds from 0 to 30 RPM, and includes water cooling and adjustable height up to 50mm to optimize deposition uniformity.
Wichtigste Merkmale
- Six evaporation sources: three metallic boat-type sources reaching up to 1500°C and three organic cluster beam sources with temperature range 0-700°C.
- Simultaneous co-deposition capability from multiple sources for complex multilayer film fabrication.
- Integrated glovebox with purification system maintaining oxygen and humidity below 1 ppm for sensitive material processing.
- Vacuum system combining turbomolecular and mechanical pumps achieving vacuum levels as low as 1.0E-5 Torr.
- Sample holder with water cooling, rotation (0-30 RPM), and adjustable height for precise film thickness control.
- PLC touchscreen control for real-time monitoring of pressure, temperature, water and oxygen levels, and film thickness.
- Optional gas inlet/outlet ports and water chiller support for extended process flexibility.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Heating Chamber Material | Edelstahl 304 |
| Heating Chamber Dimensions (L×W×H) | 400mm × 400mm × 450mm |
| Sichtfenster | 4-inch with anti-fouling baffle |
| Vakuumniveau | Down to 1.0E-5 Torr (with turbomolecular pump) |
| Sample Holder Capacity | Up to 150mm × 150mm substrates |
| Sample Rotation Speed | 0–30 RPM |
| Sample Holder Height Adjustment | Up to 50mm |
| Metallic Evaporation Sources | 3 boat-type, max temperature 1500°C, constant current/voltage modes |
| Organic Cluster Beam Sources | 3 sources, temperature range 0–700°C, adjustable angle up to 15° |
| Power Supply (Evaporation Coater) | AC 380V ±10%, 3-phase, 5-wire, 50Hz, 8KW |
| Power Supply (Glovebox) | AC 220V ±10%, single phase, 50Hz, 1KW |
| Gas Inlet/Outlet (Optional) | 8mm O.D tube fitting, 0.55–0.6 MPa required |
| Water Cooling Flow (Optional) | 15–20 L/min at 15–25°C |
| Vacuum Leak Rate | Less than 5 × 10⁻⁸ Pa·L/s |
Typische Anwendungsbereiche
This system is ideal for research and development of perovskite solar cells and other advanced optoelectronic devices requiring precise multilayer thin film deposition under ultra-clean, controlled environments. It supports deposition of metals such as copper and silver, as well as organic materials like C60, NPB, and TPBi, enabling versatile fabrication workflows.
Hinweise zur Konfiguration und zum Betrieb
The system includes a PLC touchscreen interface for comprehensive control and monitoring of vacuum pressure, temperature, oxygen, and water levels. Optional accessories include gas inlet/outlet fittings and a water chiller, which is required for operation but sold separately. Safety features include interlocks for water flow detection and alarms for overcurrent, overvoltage, and electrode open-circuit conditions. Proper installation of a two-stage pressure regulator is mandatory when using gas cylinders to ensure safe operation within specified pressure limits.
