EQ-SKJ-LCZ Vacuum Levitation Melting Crystal Grower with 40kW RF Induction, 2000ºC Max, and Precision Pulling Mechanism
The EQ-SKJ-LCZ is engineered for the growth of high-purity crystals from metallic alloys by employing vacuum levitation melting technology. This method eliminates crucible contamination by levitating the metal melt within a water-cooled copper crucible under high vacuum conditions, enabling melting temperatures up to 2000ºC. The system is ideal for research and development environments requiring precise control over crystal growth parameters.
주요 기능
- 40 kW RF induction power source with adjustable frequency (80-200 kHz) and current (10-100 A)
- High vacuum chamber (Φ400 x 40 mm) achieving 10-6 torr vacuum with turbopump (700 L/s capacity)
- Precision pulling system with speed range 0.1–24 mm/h and rotary rod rotation 0.03–50 r/min
- Quartz observation window (Φ300 mm) and KF-25 ports for gas inlet/outlet
- Water cooling requirements: >110 L/min at 30 °C recirculating water flow (water chiller not included)
- Optional cold water pulling rod available upon request
기술 사양
| 매개변수 | 사양 |
|---|---|
| RF Induction Power Source | 40 kW max, 80-200 kHz frequency, 10-100 A current, 200 V ±10%, three-phase, 50/60 Hz |
| Water Cooling Pressure & Flow (Power Source) | 0.2 MPa, 10 L/min |
| Copper Crucible Dimensions | Inner diameter 35 mm, depth 60 mm |
| Melting Capacity | Up to 60 g metal |
| Water Flow Required (Crucible) | 58 L/min |
| Vacuum Chamber Material & Size | Stainless Steel 304 with water cooling jacket, Φ400 x 40 mm |
| Vacuum Level | 10-6 torr (using turbopump) |
| Vacuum Pump Capacity | High-speed turbopump, 700 L/s |
| Pulling Speed Range | 0.1 to 24 mm/h |
| Pulling Rod Rotation Speed | 0.03 to 50 r/min |
| Pulling Travel Distance | 250 mm |
| Observation Window Diameter | Quartz window, Φ300 mm |
| Water Cooling Requirements (System) | >110 L/min at 30 °C recirculating water flow (water chiller not included) |
대표적인 적용 분야
This crystal grower is suited for producing high-purity single crystals of metallic alloys for materials science research, semiconductor development, and advanced metallurgy. Its contamination-free levitation melting process is particularly valuable for experimental studies requiring ultra-clean crystal growth environments.
구성 및 작동 안내
The system includes the RF induction power supply, vacuum chamber with turbopump, water-cooled copper crucible, and precision pulling mechanism. A cold water pulling rod is available as an optional accessory at additional cost. The water chiller for cooling is not included and must be procured separately. Proper water flow and pressure must be maintained to ensure stable operation and prevent overheating. Operators should observe safety protocols for high-voltage RF equipment and high-vacuum systems.
