OTF-1200X-PV-HVS High Vacuum Compact Tube Furnace with 1200°C Max Temperature, 8″ Heating Zone, and Integrated Turbo Vacuum System
The OTF-1200X-PV-HVS is engineered for laboratory applications requiring controlled high-temperature treatments under high vacuum conditions. It integrates a compact tube furnace capable of reaching temperatures up to 1200°C with a high-performance turbomolecular vacuum pump system. This combination enables precise thermal processing within a sealed quartz tube environment, suitable for materials research, thin film processing, and vacuum annealing.
The heating chamber consists of a 60mm outer diameter quartz tube sealed by vacuum flanges equipped with gas inlet/outlet fittings, thermocouple feedthroughs, and a mechanical vacuum gauge. The turbopump, connected via a KF40 clamp, achieves an ultimate vacuum level as low as 10^-6 torr at ambient temperature, ensuring minimal contamination and precise atmosphere control during heat treatment.
주요 기능
- Maximum operating temperature of 1200°C for short durations, with continuous operation up to 1100°C and vacuum operation up to 1000°C.
- Single-zone heating with an 8-inch (200mm) heating zone and a uniform temperature zone of 2.3 inches (60mm) ±2°C at 600°C.
- PID programmable temperature controller supporting up to 30 segments with ±1°C accuracy and built-in safety protections.
- Heating elements made of Mo-doped Fe-Cr-Al alloy for durability and efficient heating.
- Double-layer steel structure with cooling fans to maintain surface temperature below 70°C.
- Alumina fibrous thermal insulation coated for enhanced energy efficiency and extended heating chamber life.
- Complete vacuum flange set with gas fittings, needle valve, thermocouple feedthrough, and integrated vacuum gauge.
- Compact turbomolecular pump system from Germany with vacuum gauge and valve for reliable high vacuum generation.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Power Supply | 120 VAC, 20 A, 50/60 Hz, single phase or 208-240 VAC, 10 A, 50/60 Hz, single phase |
| Power Consumption | 1.2 kW |
| 최고 기온 | ≤1200°C (up to 1 hour), ≤1100°C continuous, ≤1000°C under vacuum |
| Heating Rate | ≤20°C/min |
| Heating Zone Length | 8 inches (200 mm), single zone |
| Uniform Temperature Zone | 2.3 inches (60 mm) ±2°C at 600°C |
| Temperature Controller | PID with auto-tune, 30 programmable segments, ±1°C accuracy, DB9 PC communication port |
| Heating Elements | Mo-doped Fe-Cr-Al alloy |
| Thermocouple Type | Type K (TCK8S3B) |
| Quartz Tube Dimensions | 60 mm OD × 55 mm ID × 600 mm length |
| Vacuum Flanges | 60 mm OD flange set with 1/4″ gas inlet/outlet, needle valve, 1/4″ quick-connect thermocouple feedthrough, vacuum gauge |
| 최대 압력 | < 3 psig |
| Ultimate Vacuum | 10^-6 torr (with turbopump at ambient temperature) |
| 진공 펌프 | Compact turbomolecular pump system with gauge and valve (Made in Germany) |
| Software (Optional) | LabVIEW-based temperature control system for editing profiles, recipe management, and data logging |
| Certifications | CE certified; NRTL or CSA certification available upon request |
대표적인 적용 분야
Ideal for vacuum annealing, thin film deposition processes, materials synthesis, and thermal treatments requiring precise temperature control and high vacuum environments. Suitable for research laboratories focusing on semiconductor, ceramics, and advanced material development.
구성 및 작동 안내
The furnace includes a pair of quartz blocks to minimize heat loss from the heating zone. Crucibles for sample containment are available separately. The vacuum flange set provides multiple fittings for gas inlet/outlet and thermocouple feedthroughs. The turbomolecular pump system requires proper handling and maintenance to ensure optimal vacuum performance. Users should observe safety precautions related to high temperatures and vacuum operation. Optional LabVIEW-based software enhances temperature profile customization and data acquisition.
