GSL-1800X-ZF6-PSC High Vacuum Thermal Evaporation Coater with Six Sources for Perovskite Solar Cell Fabrication
The GSL-1800X-ZF6-PSC is engineered to meet the demanding requirements of depositing multiple materials used in perovskite solar cells, including copper, silver, lead iodide, and cesium bromide. This coater enables simultaneous evaporation from two different source types under a high vacuum environment reaching pressures as low as 10⁻⁶ torr, ensuring high purity and uniform thin films essential for solar cell performance.
Its stainless steel vacuum chamber features a 400 mm inner diameter and polished finish, equipped with a hinged door and a 100 mm observation window for convenient sample handling and process monitoring. The system supports integration with gloveboxes for controlled atmosphere processing, enhancing its versatility for sensitive materials.
주요 기능
- Four included evaporation sources: one tungsten heating boat (up to 2000 °C) with water cooling and three resistance coil-heated crucibles (up to 500 °C) with precise temperature control.
- Sample holder accommodates up to 150 x 150 mm samples with rotation speeds from 0 to 30 rpm and heating capability up to 700 °C.
- Vacuum system optionally includes a 260 L/s turbo molecular pump achieving 5.0×10⁻⁶ Torr in 40 minutes and a mechanical backing pump for initial rough vacuum.
- Motorized shutters for each evaporation source allow precise control of deposition timing.
- Optional quartz crystal microbalance provides in-situ thickness measurement with 1.0 Å accuracy.
- Control unit integrates vacuum, thickness, and power management, separated from the chamber for mobility.
- Capability to connect with single or double glovebox systems for inert atmosphere processing.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Input Power | AC 220V ±10%, three-phase, 50/60 Hz, total 8 kW (~32A) |
| Vacuum Chamber | Stainless steel (SS304), 400 mm ID x 400 mm depth x 450 mm height, polished finish, 100 mm observation window, hinged door |
| Vacuum Pump (optional) | 260 L/s turbo molecular pump, vacuum level 5.0×10⁻⁶ Torr after 40 min, limit vacuum 5.0×10⁻⁷ Torr after baking, mechanical backing pump required |
| Evaporation Sources | One tungsten heating boat (70L x 12W x 3H mm) with water cooling, three resistance coil-heated crucibles with temperature control |
| Sample Holder | Max sample size 150 x 150 mm, rotation 0-30 rpm, heating up to 700 °C, evaporation distance up to 60 mm |
| Thickness Monitor (optional) | Quartz crystal microbalance with 1.0 Å accuracy |
| Control Unit | Integrated vacuum, thickness, and power control; separate movable unit |
| Glovebox Integration | Compatible with single or double glovebox setups |
대표적인 적용 분야
This coater is ideal for fabricating and modifying thin films of perovskite solar cells and other advanced materials requiring high vacuum thermal evaporation. It supports research and development in photovoltaic device manufacturing and material science.
구성 및 작동 안내
The system requires a chilled water supply of over 16 L/min for electrode cooling or a recirculating water chiller. The vacuum pump is optional but recommended for achieving the specified vacuum levels. The coater can be optionally connected to gloveboxes for controlled atmosphere processing. Proper safety precautions should be observed when handling high temperatures and vacuum conditions.
