VTC-300BUSS Automated Ultrasonic Spin-Spray Coater with Heater and Fume Hood for Up to 12″ Wafers
The VTC-300BUSS is engineered to facilitate uniform thin-film deposition on substrates up to 12 inches (300 mm) in diameter or 8 inches square. It integrates ultrasonic atomization with spin coating and rapid drying capabilities, enabling precise control over film formation processes commonly required in advanced materials research such as perovskite solar cells and flexible composite films.
This system utilizes an ultrasonic atomizer capable of swinging across the substrate surface to enhance coating uniformity. The liquid coating material is delivered via a precision syringe pump, which can optionally be heated to maintain fluid properties. After deposition, an IR heater within the built-in fume hood quickly dries the film while ensuring operator safety through effective ventilation and integrated LED illumination.
주요 기능
- Spin coater with vacuum chuck holds substrates up to 12″ diameter or 8″ square, spin speed programmable from 300 to 3000 rpm.
- Ultrasonic spray system includes one generator (up to 50 kHz, 100 W) with two nozzles (cylindrical and cone types) for narrow (~20 mm) and wide (~40 mm) spray patterns.
- Syringe pump with LCD touch screen control and 50 mL syringe included; pumping rate adjustable from 0.01 to 0.99 mm/min (0.08 to 35 mL/min for included syringe).
- Ultrasonic spray head mounted on a swing arm with adjustable swing speed from 1° to 20° per second to improve coating uniformity.
- Built-in fume hood with 4″ venting port, integrated IR heater with temperature control up to 80°C, and LED lighting for safe and effective drying.
- Touch screen control panel allows precise adjustment of ultrasonic power, spray rate, spin speed, heating temperature, and spraying time.
- Optional expansion to 2-4 ultrasonic swing spray heads available for multilayer coating processes.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Power Supply | 208 – 240 VAC, 50/60 Hz, single-phase, 1800 W total |
| Spin Coater | Vacuum chuck for substrates up to 12″ diameter or 8″ square; spin speed 300 – 3000 rpm programmable; oil-less vacuum pump included |
| Ultrasonic Spray System | One ultrasonic generator (up to 50 kHz, 100 W) with two nozzles (cylindrical ~20 mm spray, cone ~40 mm spray); swing arm with 1°-20°/s swing speed; recommended compressed inert gas or air at ~2 psi (not included) |
| Fluid Parameters | Viscosity 1 – 50 mPa·s (cP); particle size 10-20 microns for suspensions with ≤10% solids |
| Syringe Pump | Includes 50 mL syringe; accommodates syringes 0.4-30 mm diameter; pumping rate 0.01-0.99 mm/min (0.08-35 mL/min); optional heatable and multi-channel pumps available |
| Control Panel | Touch screen control for spin speed, nozzle swing speed, temperature (RT to 50°C), spraying time (1-999 s), and syringe pump speed |
| Fume Hood & Heating | Built-in fume hood with 4″ vent port; IR heater up to 80°C; LED lighting inside hood |
| Compliance | CE Certified; NRTL certification available with compressive gas atomizing spray nozzle |
대표적인 적용 분야
The VTC-300BUSS is suited for thin-film preparation in research and development environments, including perovskite solar cells, composite materials, flexible films, and other advanced coating applications requiring precise control over film thickness and uniformity.
구성 및 작동 안내
Optional upgrades include additional ultrasonic spray heads (up to four) and heatable or multi-channel syringe pumps for complex coating processes. The system requires a compressed inert gas or air supply at approximately 2 psi for ultrasonic atomization; appropriate pressure regulators must be installed when using gas cylinders to ensure safe operation. Users should avoid overflushing the water bowl/base to prevent damage and consider substrate cleaning with plasma or UV-Ozone treatment prior to coating to improve film quality.
