VTC-100PA High-Speed Tabletop Spin Coater with 10,000 RPM, 5″ Substrate Capacity, and Optional Heating or UV Curing Cover up to 200°C
The VTC-100PA spin coater is engineered for laboratory applications requiring uniform thin film deposition on substrates up to 5 inches in diameter. It is particularly suited for coating delicate or thin samples, which can be securely held in place using vacuum chucks. This device supports operation inside inert atmosphere gloveboxes, enabling coating under argon gas environments for sensitive materials.
Equipped with a precision DC servo motor, the VTC-100PA offers programmable control over spin speed (500 to 10,000 rpm), acceleration (100 to 2000 rpm/s), and spin duration (up to 60 seconds per segment). The digital interface allows storage of up to 12 programs with 6 segments each, facilitating complex coating protocols. The corrosion-resistant polypropylene chamber and vacuum chuck system ensure cleanroom compatibility and reliable substrate handling.
주요 기능
- Programmable spin speed range from 500 to 10,000 rpm with <5% accuracy
- Vacuum chuck system with two polypropylene chuck sizes (44 mm and 10.2 mm inner diameter) to hold substrates from 10 mm up to 5″ diameter
- Corrosion-resistant polypropylene chamber with 150 mm diameter and gas inlet port for inert gas atmosphere control
- Includes a 120 L/min oilless vacuum pump and vacuum tubing for substrate fixation
- Digital control panel stores up to 12 programs, each with 6 programmable segments for speed, acceleration, and duration
- Optional accessories: heating covers with PID temperature controllers (up to 120°C or 200°C), PTFE vacuum chuck, UV LED curing system (365 nm wavelength), and precision liquid injection syringes
- Compatible with operation inside argon gloveboxes with appropriate feedthroughs
기술 사양
| 매개변수 | 사양 |
|---|---|
| Maximum Spin Speed | 10,000 rpm |
| Spin Speed Range | 500 – 10,000 rpm programmable |
| Acceleration | 100 – 2000 rpm/s adjustable |
| Spin Duration | Up to 60 seconds per segment |
| Substrate Size | 5 mm to 5″ diameter |
| Vacuum Chuck Sizes | Two polypropylene chucks with O-ring IDs of 44 mm and 10.2 mm |
| Chamber Material | Polypropylene (corrosion-resistant) |
| Chamber Diameter | 150 mm |
| 진공 펌프 | Included 120 L/min oilless vacuum pump |
| Gas Inlet Port | 6 mm diameter for inert gas flow |
| Power Supply | AC 220 V (110 V version available on request), 24 V DC motor |
| Control Interface | Digital panel with LCD, programmable up to 12 programs with 6 segments each |
대표적인 적용 분야
The VTC-100PA is ideal for laboratory thin film coating tasks including photoresist application, polymer film deposition, and surface treatment under controlled atmospheres. Its compatibility with glovebox environments and optional heating or UV curing accessories make it suitable for advanced material research and development in electronics, photovoltaics, and coatings.
구성 및 작동 안내
The standard package includes the spin coater unit, two polypropylene vacuum chucks, a 20 ml plastic syringe with needle, and an oilless vacuum pump with tubing. Optional accessories such as PTFE vacuum chucks, precision electronic pipettes, heatable glass syringes, heating covers with PID controllers, and UV LED curing systems can be added to tailor the system to specific coating requirements.
When operating inside an argon glovebox, feedthroughs are necessary to connect the vacuum pump and controller externally. Users should avoid overflushing the water bowl/base to prevent liquid damage to the motor shaft and follow recommended cleaning procedures to maintain device performance and longevity.
