OTF-800X-III-R2 Anti-Corrosive Rotary Tube Furnace with Double-Layer Quartz and SS310S Tube, 800°C Max, 3 Bar Pressure
The OTF-800X-III-R2 rotary tube furnace is engineered to handle challenging chemical processes involving highly corrosive gases such as hydrochloric acid (HCl) and methane (CH4). Its design incorporates a robust double-layer processing tube, combining an inner quartz tube with an outer SS310S high-temperature stainless steel tube, providing excellent resistance to chemical attack while maintaining structural integrity under elevated temperatures and pressures.
This furnace supports continuous operation at temperatures up to 800°C and pressures up to 3 bar, making it suitable for demanding applications requiring controlled atmospheres and precise thermal profiles. The rotary mechanism, featuring an anti-corrosive steel fixture coated with Teflon and PTFE sealing flanges, ensures reliable rotation and sealing performance under corrosive environments.
주요 기능
- Double-layer processing tube: inner quartz (52 mm ID x 60 mm OD x 1400 mm L) and outer SS310S stainless steel (62 mm ID x 70 mm OD x 1300 mm L) for corrosion resistance and mechanical strength.
- Three independently controlled heating zones totaling 600 mm length (150 + 300 + 150 mm) with ±1°C temperature accuracy and a 300 mm constant temperature zone within ±2°C.
- Maximum continuous operating temperature of 800°C, with short-term capability up to 900°C for less than one hour.
- Maximum working pressure of 3 bar and vacuum capability down to 4.5×10⁻² torr with minimal leakage rate.
- Variable tube rotation speed from 0 to 10 RPM and adjustable tilt angle from 0° to 30° via electric motor for process customization.
- Three PID digital temperature controllers with 30-segment programmable profiles for precise thermal management.
- Anti-corrosive magnetic fluid sealed swivel coupling and PTFE sealing flanges ensure gas-tight operation under corrosive conditions.
기술 사양
| 매개변수 | 사양 |
|---|---|
| Processing Tube Structure | Double-layer: Inner quartz, outer SS310S stainless steel |
| Quartz Tube Dimensions | 52 mm ID x 60 mm OD x 1400 mm Length |
| SS310S Tube Dimensions | 62 mm ID x 70 mm OD x 1300 mm Length |
| Heating Zones | 3 zones: 150 mm + 300 mm + 150 mm (total 600 mm) |
| Temperature Accuracy | ±1°C (PID control), ±2°C constant zone |
| Max Operating Temperature | 800°C continuous, 900°C max (<1 hour) |
| 최대 작동 압력 | 3 bar |
| Vacuum Capability | Down to 4.5×10⁻² torr, leakage rate <0.1 mtorr/s |
| Tube Rotation Speed | 0 to 10 RPM variable |
| Furnace Tilt Angle | 0° to 30° adjustable via electric motor |
| Power Supply | 208-240 V, single phase, 50/60 Hz, max 5 kW |
| Temperature Controllers | Three PID digital controllers, 30 segment programmable |
| Thermocouples | Three Omega K type, 3 mm OD x 6″ length |
대표적인 적용 분야
This rotary tube furnace is ideal for chemical vapor deposition, gas-solid reactions, and material synthesis processes involving corrosive gases at elevated temperatures and pressures. It is well suited for research and development in materials science, catalysis, and semiconductor fabrication where controlled atmosphere and corrosion resistance are critical.
구성 및 작동 안내
Optional accessories include vacuum pumps (mechanical or turbopump) to achieve low vacuum levels, and a laptop-based LabVIEW temperature control system with wireless remote operation for advanced process management. The sealing flanges and rotating fixtures are designed for chemical resistance but require proper handling to maintain integrity. Users should ensure compatibility of gases and operating parameters with the furnace specifications to avoid damage.
