VBF-1200X-HV High Vacuum Chamber Furnace with Quartz Chamber for 4″ Samples, Up to 1250°C
The VBF-1200X-HV furnace is engineered for precise high vacuum thermal treatments of samples measuring up to 4 inches in all dimensions. Its compact design incorporates a one-end-open quartz vacuum chamber, which is free from porous materials, ensuring compatibility with high vacuum environments. This makes it suitable for applications requiring contamination-free heating under vacuum conditions.
Heating is achieved internally via Kanthal Ni-Cr-Al resistance coils mounted on sintered ceramic sleeves, complemented by multi-layer molybdenum reflection plates that enhance thermal uniformity within the heating zone. The furnace can maintain continuous operation at temperatures up to 1200°C, with a maximum peak temperature of 1250°C for durations under 30 minutes. The heating rate is controlled up to 20°C per minute, allowing for precise thermal ramping.
Wichtigste Merkmale
- Quartz vacuum chamber sized Ø230×Ø220×H325 mm with a heating zone of Ø130×H166 mm, accommodating samples up to 100×100×100 mm or Ø100×H100 mm.
- High vacuum capability reaching 10-6 torr with an optional turbopump; standard mechanical pump achieves 10-2 torr.
- PID temperature controller with auto-tune, 30 programmable segments, and ±1°C accuracy; Eurotherm controller option available for ±0.1°C precision.
- Multiple ports including KF50/DN63 flange for turbopump, KF25 ports for electric feedthrough and vacuum gauge, plus gas inlet/outlet with needle valves.
- Power supply of 208-240 VAC, single-phase, 3 kW max; power cable included without plug, optional plug available.
- Built-in safety alarms for over-temperature and thermocouple failure.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Höchsttemperatur | 1250°C (max, <30 min), continuous ≤1200°C |
| Erwärmungsgeschwindigkeit | Up to 20°C/min |
| Heizelemente | Ni-Cr-Al resistance coil on sintered ceramic sleeve |
| Thermal Uniformity | Multi-layer molybdenum reflection plates |
| Vacuum Chamber Dimensions | Ø230×Ø220×H325 mm (standard) |
| Heating Zone Dimensions | Ø130×H166 mm |
| Maximum Sample Size | 100×100×100 mm or Ø100×H100 mm ±5°C |
| Stromversorgung | 208-240 VAC, 50/60 Hz, single-phase, max 3 kW |
| Vakuumniveau | 10-2 torr (mechanical pump), 10-6 torr (optional turbopump) |
| Temperaturregler | PID with auto-tune, 30 programmable segments, ±1°C accuracy; Eurotherm option ±0.1°C |
| Thermoelementtyp | Typ K |
| Vakuumanschlüsse | KF50/DN63 flange for turbopump, KF25 ports for feedthrough and gauge, 1/4″ gas inlet/outlet with needle valves |
Typische Anwendungsbereiche
Ideal for materials research, thin film processing, vacuum annealing, and sintering of small samples requiring controlled atmosphere and high temperature under vacuum. Suitable for semiconductor, ceramics, and advanced material laboratories.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes a power cable without a plug; an optional plug can be requested. Vacuum pumps and gauges are sold separately and can be connected via standard KF flanges. Users should ensure proper vacuum system setup and safety precautions when operating at high temperatures and vacuum levels.
