OTF-1200X-80-DVD 1200°C Tube Furnace with 3″ ID Quartz Tube and Automatic Sliding Internal Crucible for Controlled Atmosphere Sublimation and Deposition
The OTF-1200X-80-DVD tube furnace is engineered for laboratory applications requiring precise sublimation or physical vapor deposition (PVD) within a controlled atmosphere. It is especially suited for processes such as DVD substrate coating, where accurate temperature control and material positioning inside the furnace tube are critical.
This furnace incorporates a 2″ diameter quartz tube with an 80 mm outer diameter and 44 mm inner diameter, providing a heating zone length of 200 mm. A unique feature is its air-tight automatic sliding mechanism for the internal crucible, allowing manual adjustment of the sample holder and thermocouple position inside the tube via an external magnet. This enables the sample or evaporation material to be precisely located at the desired temperature zone for optimal deposition or evaporation.
Wichtigste Merkmale
- Maximum operating temperature of 1200°C with continuous operation up to 1100°C and heating rate up to 20°C/min.
- 30-segment programmable PID temperature controller with solid-state relay for precise thermal management and built-in safety protections.
- High thermal conductivity alumina flat sample holder (2″ x 1″) integrated with a K-type thermocouple for accurate temperature measurement.
- Manual magnetic drive system to move the sample holder and thermocouple inside the quartz tube without breaking vacuum or atmosphere integrity.
- Includes a small quartz crucible and quartz boat for evaporation materials or sample placement.
- Vacuum-compatible design with 2″ vacuum flange, KF25 vacuum port, and 1/4″ tube feedthrough for thermocouple insertion, supporting vacuum levels down to 10^-2 torr.
- Optional PC control module available for advanced temperature programming and monitoring.
Technische Daten
| Parameter | Spezifikation |
|---|---|
| Modell | OTF-1200X-80-DVD |
| Höchsttemperatur | 1200°C (within 1 hour) |
| Continuous Operating Temperature | 1100°C |
| Erwärmungsgeschwindigkeit | ≤ 20°C/min |
| Heating Zone Length | 200 mm (8″) |
| Konstanttemperaturzone | 60 mm (±1°C) at 1000°C |
| Tube Size | Quartz tube 50 mm OD × 44 mm ID × 1000 mm length (2″ diameter) |
| Sample Holder | Alumina flat holder 2″ L × 1″ W with K-type thermocouple |
| Temperaturregler | PID with 30 programmable segments, solid-state relay, over-temperature and thermocouple failure protection |
| Stromversorgung | 110 VAC or 208-240 VAC, 50/60 Hz, 1.5 kW |
| Heizelemente | Fe-Cr-Al alloy doped with Mo |
| Vacuum Compatibility | Supports vacuum down to 10^-2 torr with mechanical pump |
| Vacuum Flanges and Ports | 2″ flange with 1/4″ Bard fittings, 1/4″ thermocouple feedthrough, KF25 vacuum port |
Typische Anwendungsbereiche
This tube furnace is ideal for thin film deposition processes such as DVD coating, physical vapor deposition (PVD), and sublimation under controlled atmospheres. It is also suitable for research requiring precise temperature gradients and sample positioning within a vacuum or low-pressure environment.
Hinweise zur Konfiguration und zum Betrieb
The furnace includes a small quartz crucible and quartz boat for sample or evaporation material placement. The internal sample holder and thermocouple can be moved inside the tube using an external magnet, maintaining an airtight environment. Fibrous ceramic tube blocks are provided to minimize heat radiation losses and must be fully inserted before heating.
For vacuum operation, a mechanical pump achieving 10^-2 torr is recommended. Gas flow rates should be limited to below 200 SCCM to prevent thermal shock to the quartz tube. A two-stage pressure regulator is necessary to maintain gas pressure below 3 PSI for safety. Optional accessories include vacuum valves, quick connecting flanges, and multi-channel gas delivery systems for advanced deposition techniques.
