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OTF-1200X-III-SHG 24-Inch Three-Zone Tube Furnace with Hinged Flange and Quartz Tube, Up to 1200°C

Designed for precise annealing, diffusion, and sintering under controlled atmospheres.
Features a 24-inch split three-zone heating chamber with hinged flanges for easy sample access.
Operates up to 1200°C with ±1°C temperature accuracy and PID control.
Includes selectable fused quartz tubes (80-130 mm diameter) suitable for wafer processing.

Konformität: CE-zertifiziert
Maßgeschneidert: OEM/ODM
Verpackung: Sperrholzkiste

Produkte

OTF-1200X-III-SHG 24-Inch Three-Zone Tube Furnace with Hinged Flange and Quartz Tube, Up to 1200°C

The OTF-1200X-III-SHG is engineered for advanced laboratory thermal processing tasks such as sample annealing, diffusion, and sintering in various gas atmospheres. Its design accommodates precise temperature control across a 24-inch (610 mm) heating zone divided into three independently controlled segments, enabling uniform heating and temperature gradients as required by complex material synthesis and treatment protocols.

This tube furnace incorporates a hinged flange design on both ends, facilitating straightforward loading and unloading of samples. The quartz tube, available in multiple diameters (80 mm, 101 mm, and 130 mm outer diameter), supports wafer sizes up to 4 inches and is optimized for use under vacuum or low-pressure conditions below 0.12 MPa absolute pressure. The furnace’s construction includes a double-layer steel case with cooling fans and high-purity fibrous alumina insulation to maintain low external temperatures and energy efficiency.

Wichtigste Merkmale

  • Three-zone heating with lengths of 6″ + 12″ + 6″ (152.4 mm + 304.8 mm + 152.4 mm) for precise thermal control.
  • Microprocessor-based PID controllers with 30 programmable segments and ±1°C accuracy.
  • Fused quartz tube options with diameters of 80 mm, 101 mm, or 130 mm and lengths of 1200 mm.
  • Hinged flanges with KF25D adapters and vacuum gauges for easy vacuum integration and monitoring.
  • Maximum operating temperature of 1200°C in flowing gas and 1000°C under vacuum conditions.
  • Energy-saving alumina fiber insulation and cooling fans to maintain safe surface temperatures.
  • RS485 communication port for optional PC control and data logging.

Technische Daten

Parameter Spezifikation
Modell OTF-1200X-III-SHG
Heizzonen 3 zones (6″ + 12″ + 6″) total 610 mm
Temperaturbereich Up to 1200°C (flowing gas), 1000°C (vacuum)
Temperaturgenauigkeit ±1 °C
Erwärmungsgeschwindigkeit Up to 20°C/min
Heizelemente Fe-Cr-Al alloy doped with Mo
Tube Material and Sizes Fused quartz tubes: 80 mm, 101 mm, or 130 mm outer diameter; length 1200 mm
Stromversorgung AC 208-240V, Single Phase, 50/60 Hz
Stromverbrauch 6 kW max
Temperature Controllers PID with 30 programmable segments, K-type thermocouples (3), RS485 communication
Vakuumfähigkeit Max vacuum 10^-2 Torr (mechanical pump), 10^-5 Torr (molecular pump)
Isolierung High purity fibrous alumina with ceramic tube blocks
Kühlung Two cooling fans integrated

Typische Anwendungsbereiche

This tube furnace is suitable for material synthesis involving temperature-sensitive processes such as doping, annealing, and sintering of semiconductors, ceramics, and thin films. It is widely used in research fields including electrocatalyst development, crystal growth, and chemical vapor deposition (CVD) under controlled atmospheres and vacuum conditions.

Hinweise zur Konfiguration und zum Betrieb

The furnace includes hinged flanges with KF25D adapters and digital vacuum gauges for easy vacuum system integration. Two alumina fiber foam tube blocks are supplied to reduce heat radiation inside the tube and must be fully inserted before heating. Optional quartz blocks are available for enhanced cleanliness and vacuum performance. The system supports PC control via an optional MTS-02 module compatible with LabVIEW software, enabling programmable temperature profiles and remote monitoring.

Users should ensure gas cylinder pressure is regulated below 3 PSI with a two-stage pressure regulator for safety. The furnace is CE certified, and additional certifications such as NRTL or CSA can be requested. Optional accessories include vacuum pump stations, gas mixing systems, quartz sample holders, and mobile carts for furnace transport.

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