MSKPSEGEC1515 Thermal Evaporation Coater Integrated with Dual-Station Glovebox for Perovskite Solar Cell Fabrication
The MSKPSEGEC1515 system is engineered to meet the demanding requirements of fabricating high-quality perovskite solar cells through precise thin film deposition. This thermal evaporation coater is fully integrated within a dual-station glovebox, providing a rigorously controlled environment with oxygen and humidity levels maintained below 1 ppm. Such conditions are critical for handling oxygen- and moisture-sensitive materials commonly used in advanced photovoltaic research.
The system features a heating chamber constructed from 304 stainless steel, measuring 400mm x 400mm x 450mm, and includes a 4-inch observation window with an anti-fouling baffle for process monitoring. The chamber is equipped with a turbomolecular pump and mechanical pump combination, enabling vacuum levels down to 1.0E-5 Torr, essential for high-purity film deposition. The sample holder accommodates substrates up to 150mm by 150mm, supports rotation speeds from 0 to 30 RPM, and includes water cooling and adjustable height up to 50mm to optimize deposition uniformity.
Key Features
- Six evaporation sources: three metallic boat-type sources reaching up to 1500°C and three organic cluster beam sources with temperature range 0-700°C.
- Simultaneous co-deposition capability from multiple sources for complex multilayer film fabrication.
- Integrated glovebox with purification system maintaining oxygen and humidity below 1 ppm for sensitive material processing.
- Vacuum system combining turbomolecular and mechanical pumps achieving vacuum levels as low as 1.0E-5 Torr.
- Sample holder with water cooling, rotation (0-30 RPM), and adjustable height for precise film thickness control.
- PLC touchscreen control for real-time monitoring of pressure, temperature, water and oxygen levels, and film thickness.
- Optional gas inlet/outlet ports and water chiller support for extended process flexibility.
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Chamber Material | 304 Stainless Steel |
| Heating Chamber Dimensions (L×W×H) | 400mm × 400mm × 450mm |
| Observation Window | 4-inch with anti-fouling baffle |
| Vacuum Level | Down to 1.0E-5 Torr (with turbomolecular pump) |
| Sample Holder Capacity | Up to 150mm × 150mm substrates |
| Sample Rotation Speed | 0–30 RPM |
| Sample Holder Height Adjustment | Up to 50mm |
| Metallic Evaporation Sources | 3 boat-type, max temperature 1500°C, constant current/voltage modes |
| Organic Cluster Beam Sources | 3 sources, temperature range 0–700°C, adjustable angle up to 15° |
| Power Supply (Evaporation Coater) | AC 380V ±10%, 3-phase, 5-wire, 50Hz, 8KW |
| Power Supply (Glovebox) | AC 220V ±10%, single phase, 50Hz, 1KW |
| Gas Inlet/Outlet (Optional) | 8mm O.D tube fitting, 0.55–0.6 MPa required |
| Water Cooling Flow (Optional) | 15–20 L/min at 15–25°C |
| Vacuum Leak Rate | Less than 5 × 10⁻⁸ Pa·L/s |
Typical Applications
This system is ideal for research and development of perovskite solar cells and other advanced optoelectronic devices requiring precise multilayer thin film deposition under ultra-clean, controlled environments. It supports deposition of metals such as copper and silver, as well as organic materials like C60, NPB, and TPBi, enabling versatile fabrication workflows.
Configuration & Operating Notes
The system includes a PLC touchscreen interface for comprehensive control and monitoring of vacuum pressure, temperature, oxygen, and water levels. Optional accessories include gas inlet/outlet fittings and a water chiller, which is required for operation but sold separately. Safety features include interlocks for water flow detection and alarms for overcurrent, overvoltage, and electrode open-circuit conditions. Proper installation of a two-stage pressure regulator is mandatory when using gas cylinders to ensure safe operation within specified pressure limits.
