OTF-1150X-III-100 Ultra-High Vacuum Tube Furnace with 100mm ID Ni-Based Alloy Tube, 1150°C Max, 10⁻⁶ Torr Vacuum
The OTF-1150X-III-100 is engineered for precise thermal processing tasks requiring ultra-high vacuum environments and elevated temperatures. It is ideal for applications demanding controlled atmospheres and high purity, such as materials research and advanced thin film deposition. The furnace accommodates a nickel-based superalloy tube with a 100 mm inner diameter, providing excellent resistance to high temperature oxidation and mechanical stress.
This model features a three-zone heating configuration with independent control over each 300 mm zone, totaling 900 mm of heating length. The tube length is 1400 mm, allowing for extended processing space. The system achieves a maximum operating temperature of 1150°C under vacuum levels down to 10⁻⁶ torr, maintained by a 700 L/s turbopump station. The furnace casing is double-layered steel with air cooling to keep external temperatures below 60°C, ensuring safe operation.
Key Features
- Processing tube made from Ni-based superalloy (Inconel equivalent) with 100 mm ID x 110 mm OD x 1400 mm length.
- Three independent heating zones, each 300 mm long, using Kanthal Ni-Cr-Al resistance elements.
- Alumina fibrous insulation for efficient thermal retention.
- Ultra-high vacuum capability down to 10⁻⁶ torr with integrated 700 L/s turbopump and CF flanges.
- Digital temperature control via three Eurotherm 300 controllers with ±0.1°C accuracy and PC connectivity through RS485.
- Double-layer steel casing with air cooling to maintain safe external temperatures.
- Optional diffusion pump available for cost reduction upon request.
Technical Specifications
| Parameter | Specification |
|---|---|
| Model | OTF-1150X-III-100 |
| Maximum Temperature | 1150°C |
| Vacuum Level | Down to 10⁻⁶ torr |
| Processing Tube Material | Ni-based superalloy (Inconel equivalent) |
| Tube Dimensions (ID x OD x Length) | 100 mm x 110 mm x 1400 mm |
| Heating Zones | 3 zones, each 300 mm length (total 900 mm) |
| Heating Elements | Kanthal Ni-Cr-Al resistance wire |
| Thermal Insulation | Alumina fibrous |
| Vacuum Pump | 700 L/s turbopump station with CF160 port and manual gate valve |
| Temperature Control | Three Eurotherm 300 digital controllers, ±0.1°C accuracy, RS485 PC interface |
| Power Supply | 208-240 VAC, single phase, 50/60 Hz, <10 kW; optional 380 VAC 3-phase |
| Cooling | Air cooling for outer casing |
Typical Applications
This furnace is suited for advanced materials processing under ultra-high vacuum, including thin film deposition, annealing of sensitive materials, and research requiring controlled atmosphere and high temperature stability.
Configuration & Operating Notes
The system includes CF type flanges on both ends of the processing tube for vacuum sealing. The turbopump station connects via a CF160 port with a manual gate valve for vacuum isolation. Optional diffusion pump configurations are available to reduce costs. Operators should ensure proper air cooling and electrical supply compliance. The furnace is CE certified, with additional certifications available upon request.
