VTC-300USS Ultrasonic Spin-Spray Coater for Uniform Liquid-Phase Coating on Substrates up to 12″ Diameter
The VTC-300USS is engineered to address the challenge of achieving ultra-uniform liquid-phase coatings on large substrates, including wafers up to 12 inches in diameter or 8-inch square samples. This system is ideal for applications requiring dense and homogeneous films, such as polymer coatings, composite materials, and low-temperature precipitation processes like RF/microwave ferrite deposition.
By integrating spin coating with ultrasonic spray technology, the VTC-300USS enables precise control over film thickness and uniformity even on patterned or uneven substrates. The system supports multiple operational modes: combined spin and spray, spin only, or spray only, providing flexibility for various coating requirements.
Key Features
- Vacuum chuck with adjustable holders secures flat substrates up to 12″ diameter or 8″ square for stable spinning.
- Spin speed adjustable between 300 and 3000 rpm; recommended maximum 2000 rpm for wafers larger than 8″ for safety.
- Two ultrasonic spray nozzles included: a cylindrical nozzle (~20 mm spray diameter) and a cone nozzle (~40 mm spray diameter) with compressed air shaping.
- Heatable syringe pump with LCD touch control delivers coating liquid at rates from 0.001 to 20 mm/min; accommodates syringes 0.4 to 30 mm diameter and heats up to 75 °C.
- Integrated flow meter monitors compressed air (~2 psi recommended) for consistent spray atomization.
- Built-in swing arm for ultrasonic spray head allows adjustable speed and movement range during coating.
- Optional dual heat lamps (up to 1000 W) available for substrate heating by radiation, reaching up to 65 °C on 12″ metal substrates.
Technical Specifications
| Parameter | Specification |
|---|---|
| Maximum Substrate Size | 12″ diameter or 8″ square |
| Spin Speed Range | 300 – 3000 rpm (recommended ≤2000 rpm for >8″ wafers) |
| Vacuum Chuck | Oil-less pump included, adjustable substrate holders |
| Ultrasonic Spray Nozzles | Two nozzles: cylindrical (~20 mm spray), cone (~40 mm spray), KF-25 adapter |
| Compressed Air Pressure | ~2 psi recommended for aqueous solutions |
| Fluid Viscosity Range | 1 – 100 mPa·s (cP) |
| Syringe Pump Capacity | 20 mL syringe included; accepts 0.4 – 30 mm diameter syringes |
| Pumping Rate | 0.001 – 20 mm/min adjustable |
| Syringe Heater | Polyimide heater with 30-segment programmable controller, max 75 °C |
| Power Supply | 208 – 240 VAC, 50/60 Hz, 3000 W total |
Typical Applications
The VTC-300USS is suitable for coating processes requiring uniform thin films on large substrates, including polymer coatings, composite material deposition, and low-temperature precipitation of ferrites for RF and microwave devices. It is also effective for coating patterned or uneven surfaces where uniform coverage is critical.
Configuration & Operating Notes
The system includes a vacuum chuck, two ultrasonic spray nozzles with compressed air shaping, a heatable syringe pump with control interface, and a swing arm for spray head movement. Optional dual heat lamps can be added for substrate heating. For safety and optimal performance, it is recommended to operate the coater inside a fume hood with proper exhaust. When using gas cylinders instead of an air compressor, a two-stage pressure regulator must be installed to maintain safe operating pressure.
Care should be taken to avoid overflushing liquids into the base to prevent damage to the motor shaft. Cleaning substrates with a plasma cleaner prior to coating can significantly improve coating uniformity by reducing surface tension.
