OTF-1200X-S-50-DFSL Dual Sliding Tube Furnace for Thermal CVD with 50 mm Quartz Tube and 1200°C Max Temperature
The OTF-1200X-S-50-DFSL is engineered to meet the demanding requirements of thermal chemical vapor deposition (CVD) applications where precise temperature control and flexible sample positioning are critical. This system incorporates two independent tube furnaces mounted on sliding rails, enabling users to position source materials for evaporation or sublimation and film deposition with ease. Each furnace accommodates a 50 mm outer diameter quartz tube, 1500 mm in length, suitable for vacuum and low-pressure environments below 0.2 bar.
By sliding the furnaces along the rails, rapid heating and cooling cycles can be achieved, with maximum rates reaching approximately 100°C per minute. This design allows for efficient thermal processing, including fast sample cooling by moving the heated zone away from the sample. The system supports continuous operation up to 1100°C and short-term maximum temperatures of 1200°C. The quartz tubes are sealed with stainless steel vacuum flanges equipped with vacuum gauges, and optional flange configurations are available for enhanced vacuum monitoring and cooling.
Key Features
- Dual tube furnaces with double-layer steel construction, each with a 200 mm heating zone and 60 mm constant temperature zone.
- Sliding rail system with up to 400 mm manual travel per furnace for flexible positioning.
- Maximum temperature of 1200°C (short term) and continuous operation at 1100°C.
- Heating elements made of Mo-doped Fe-Cr-Al alloy for reliable high-temperature performance.
- PID automatic temperature controllers with 30 programmable segments and built-in over-temperature protection.
- Includes two K-type thermocouples and stainless steel vacuum flanges with vacuum gauges.
- Optional upgrades: motorized sliding, mass flow controller gas delivery, RF plasma generator, and high-temperature alloy tubes for higher pressure operation.
Technical Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C (under 1 hour) |
| Continuous Operating Temperature | 1100°C |
| Heating Zone Length | 200 mm per furnace |
| Constant Temperature Zone Length | 60 mm (±3°C at 800°C) |
| Heating Elements | Mo-doped Fe-Cr-Al alloy |
| Processing Tube | Quartz tube, 50 mm OD x 44 mm ID x 1500 mm length; optional S310 alloy tube for higher pressure (100 PSI) |
| Temperature Control | PID controllers with 30 programmable segments; ±1°C accuracy; includes two K-type thermocouples |
| Power Supply | AC 208-240V or 110-120V, single phase, 50/60 Hz; 1.2 kW per furnace (2.4 kW total) |
| Sliding Rails | Double rails with 400 mm max manual sliding distance per furnace; includes slide-stopping clamps |
| Vacuum Flanges | Stainless steel with vacuum gauge; optional KF25 port and digital gauge available |
| Vacuum Capability | Down to 10⁻⁵ torr with molecular pump; 10⁻² torr with mechanical pump (pump not included) |
| Heating and Cooling Rates | Up to 15°C/sec at low temps; max 100°C/min by sliding furnace between zones |
Typical Applications
Ideal for thermal CVD processes involving evaporation, sublimation, and thin film deposition under vacuum or low-pressure conditions. Suitable for research and development in materials science, semiconductor fabrication, and coating technologies requiring precise thermal cycling and flexible sample positioning.
Configuration & Operating Notes
The furnace system includes hermetic flanges for immediate vacuum use and two K-type thermocouples for temperature monitoring. Optional accessories include motorized sliding rails, multi-channel gas mixing and delivery systems, RF plasma generators for plasma-enhanced processing, and high-temperature alloy tubes for higher pressure applications. Users must install a two-stage pressure regulator on gas cylinders to limit pressure below 3 PSI for safe operation. Fast cooling by sliding the furnace away requires appropriate heat-resistant protective gear. The system is CE certified, with additional certifications available at extra cost.
