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OTF-1200X-4-R-II-UL Two Zone Rotary CVD Tube Furnace with 1200°C Max Temperature and 4-Inch Quartz Tube

Designed for uniform calcination and rotary chemical vapor deposition (CVD) of battery materials.
Ideal for Li-ion battery cathode and anode material preparation.
Two heating zones totaling 400 mm with ±1°C temperature stability.
Variable quartz tube rotation speed up to 10 RPM and max temperature 1200°C.

Compliance: CE Certified
Customized: OEM/ODM
Package: Plywood case package

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OTF-1200X-4-R-II-UL Two Zone Rotary CVD Tube Furnace with 1200°C Max Temperature and 4-Inch Quartz Tube

The OTF-1200X-4-R-II-UL is engineered to address the challenges of achieving uniform heat treatment and chemical vapor deposition (CVD) in the synthesis of advanced battery materials. This rotary tube furnace is particularly suited for calcining inorganic compounds and coating lithium-ion battery cathode materials such as LiFePO4 and LiMnNiO3, as well as silicon/carbon anode materials via rotary CVD processes.

Featuring two independently controlled heating zones, each 200 mm in length, the furnace provides a stable and uniform temperature environment with a constant temperature zone of 200 mm maintaining ±1°C accuracy when both zones are set identically. The quartz processing tube, 4 inches in diameter, is rotated by a variable speed DC motor (0–10 RPM) to enhance material uniformity during heat treatment or deposition. The furnace can also be tilted between -5° and 20° to accommodate specific process requirements.

Key Features

  • Two-zone heating with a total length of 400 mm and ±1°C temperature stability in the constant zone.
  • Rotary quartz tube driven by a DC motor with adjustable speed from 0 to 10 RPM.
  • Maximum continuous operating temperature of 1100°C; short-term max temperature up to 1150°C (under 30 minutes).
  • Double shell casing with alumina fibrous insulation and three cooling fans for energy efficiency.
  • Split cover design for faster cooling and easier operation.
  • Includes one pair of 60 mm stainless steel sealing flanges with needle valves and rotatable gas connectors.

Technical Specifications

Parameter Specification
Model OTF-1200X-4-R-II-UL
Working Voltage 208 – 240 V, single phase (30 A breaker required)
Output Power 2.5 kW
Heating Zones Two zones, each 200 mm; total 400 mm heating length
Temperature Stability ±1°C in constant zone
Max Continuous Temperature 1100°C
Max Short-Term Temperature 1150°C (under 30 minutes)
Heating Rate Recommended 10°C/min; max 15°C/min
Tube Material Fused quartz (4 inch diameter)
Tube Rotation Speed 0 – 10 RPM variable
Furnace Tilt Angle -5° to 20°
Gas Fittings Inlet: 6 mm O.D. elbow push-in; Outlet: 12 mm O.D. elbow push-in
Temperature Controllers Two PID digital controllers with 30-segment programmable profiles
Thermocouples Two Omega K-type, 3 mm OD × 6″ length
Chamber Pressure 4.5×10⁻² torr; leak rate <0.1 mTorr/s when sealed

Typical Applications

This furnace is optimized for the preparation of lithium-ion battery cathode materials with conductive coatings and silicon/carbon anode materials using rotary CVD. It supports uniform calcination and coating processes essential for high-performance battery electrode development.

Configuration & Operating Notes

The furnace includes a fused quartz tube and stainless steel sealing flanges with needle valves and rotatable gas connectors. Optional tubes made of high purity graphite, high-temperature stainless steel alloy, or anti-corrosive double-layer materials are available for specialized applications and higher temperature or corrosive gas environments.

Operation under vacuum or ambient pressure below 0.2 bar is recommended. A two-stage pressure regulator must be installed on gas cylinders to limit pressure below 3 PSIG for safety. The vacuum pressure limit for quartz tubes is up to 1000°C.

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